Fluorinated aminoalkoxide CuII complexes: new CVD precursors for deposition of copper metal

Iridium Metal Thin Films and Patterned IrO2 Nanowires Deposited Using Iridium(I) Carbonyl Precursors

“…[14] The alkyl substituent of these ligands was also varied in an attempt to further adjust the volatility of the synthesized complexes. In this respect, five iridium carbonyl complexes, 1-5, were obtained by mixing the corresponding sodium salt of the anionic ligand, which is generated in situ from the reaction with NaH, and the iridium starting material [Ir(COD)(l-Cl)] 2 in tetrahydrofuran (THF) solution at room temperature.…”

“…The fluorinated imino and amino alcohol reagents were prepared using literature procedures [14]. All reactions were performed under nitrogen using anhydrous solvents or solvents treated with appropriate drying reagent.…”

Copper(II) Oligomeric Derivatives for Deposition of Copper Thin Films

“…[14] Furthermore, copper metal provides enhanced device performance related to reduced cross talk, improved operational speed and RC delay etc. [15] The successful contribution of precursors towards the required material and desired device fabrication is mainly dependent upon the precursor properties. They must have solubility in common organic solvents, volatility and stability to ambient environment and a large thermal window between volatilization and decomposition.…”

A combined experimental and computational investigation on Tetrakis-μ-acetato-bis(acetamido)dicopper(II) and its application as a single source precursor for copper oxide

“…In this context, several copper(I) and (II) complexes have been used as copper molecular sources. Nevertheless, despite several works in the field, there is still the demand for novel CVD copper source reagents possessing the combined advantages of Cu(I) and Cu(II) compounds, namely the high thermal stability, appreciable volatility at moderate temperatures, long shelf-life in air, and possibly the capacity of depositing Cu(0) in the absence of reducing gases [9][10][11].Herein, we wish to report on the preparation and characterization of tetrakis-μ-acetato-bis(acetamido)dicopper(II) [Cu(O 2 CCH 3 ) 2 (CH 3-CONH 2 )] 2 (1). Particular attention is also devoted to highlighting the complex thermal properties by the use of thermal analyses technique, in view of eventual CVD applications.…”