“…Micropump applications are numerous and include implantable drug delivery (1,2), micro total analysis systems (3), reagent delivery in fuel cells (4), microelectronics cooling (5), micro power systems (6), and fuel injection in internal combustion engines (7). Of these, in-vivo drug delivery may have the most stringent constraints, requiring precise drug dosing, low power consumption, operation against moderate back pressures, high reliability, and minimal control complexity.…”