Fluctuations of the number of particles and mass adsorbed on the sensor surface surrounded by a mixture of an arbitrary number of gases

Djurić, Z.; Jokić, Ivana; Frantlović, Miloš; Jakšić, Olga

doi:10.1016/j.snb.2007.05.025

Cited by 25 publications

(18 citation statements)

References 16 publications

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“…Subsequently, theoretic models of AD noise were devised for different cases of gas adsorption on the surface of micro/nanostructures: adsorption of an arbitrary number of gases [27][28][29], adsorption in an arbitrary number of layers [30,31], and adsorption coupled with mass transfer [32]. All of them are based on the established analogy between AD processes and the coresponding GR processes.…”

Section: A Adsorption-desorption Noise In Mems/nems Resonatorsmentioning

confidence: 99%

RF MEMS and NEMS components and adsorption-desorption induced phase noise

Jokić

Frantlović

Djurić

2014

2014 29th International Conference on Microelectronics Proceedings - MIEL 2014

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Radio frequency micro-and nanoelectromechanical systems (RF MEMS and RF NEMS) and technologies have a great potential to overcome the constraints of conventional IC technologies in realization of fully integrated transceivers of next generation wireless communications systems. During the last two decades a considerable effort has been made to develop RF MEMS/NEMS resonators so that they could replace conventional bulky off-chip resonators in wireless transceivers. In MEMS, and especially in NEMS resonators, additional noise generating mechanisms exist that are characteristic for structures of small dimensions and mass, and high surface to volume ratio. One such mechanism is the adsorption-desorption (AD) process that generates the resonator frequency (phase) noise. In the first part of this paper a short overview of RF MEMS resonators is given, including comments on the necessary improvements and the direction of future research in this field (especially having in mind the need for NEMS resonators), with the intention to optimize RF MEMS and NEMS components according to requirements of both current and future systems. The main part of the paper presents a comprehensive theory of AD noise in MEMS/NEMS resonators. Apart from having a theoretical significance, the derived models of AD noise in multiple different cases of adsorption are also a useful tool for the design of optimal performance RF MEMS and NEMS resonators. The model of the MEMS/NEMS oscillator phase noise that takes into account the influence of AD noise is presented for the first time.

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Section: A Adsorption-desorption Noise In Mems/nems Resonatorsmentioning

confidence: 99%

RF MEMS and NEMS components and adsorption-desorption induced phase noise

Jokić

Frantlović

Djurić

2014

2014 29th International Conference on Microelectronics Proceedings - MIEL 2014

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“…Since the atmosphere around the resonator is a mixture of gases in a majority of cases, we expanded our analysis to address the case of the simultaneous adsorption of particles of two or more different gases on the resonator surface [22]. The exact expressions are derived for the power spectral density of the fluctuations of the number of adsorbed particles for each gas from the mixture, as well as for the total adsorbed mass fluctuation, using the analytical Langevin approach.…”

Section: Ad Processesmentioning

confidence: 99%

“…The possibility of developing the method for identification of the gases in mixtures based on the AD noise spectral density can also be considered [22]. While gas identification is possible in the case of a single gas atmosphere, the number and the position of "knees" in the noise spectrum (Figs.…”

Section: Ad Processesmentioning

confidence: 99%

Micro- and nanosystems based on vibrating structures

Djurić

2008

2008 26th International Conference on Microelectronics

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Invention of the scanning force microscope in 1986 and development of micro and nanofabrication technologies yielded a new generation of vibration based miniature sensors of physical, chemical and biological parameters, with sensitivity which could not be achieved before. This promoted again the research of micro and nanoelectromechanical systems (MEMS and NEMS) in the fields that have been dominated by semiconductor electronics for more than a half of century.In this paper the principles of operation of the miniature vibrating structures are given. A particular attention is given to the fact that the mass of these structures is of the order of tens of picograms, and that their dimensions can be in the submicrometer range, where the effects of Brownian motion of particles in the surroundings become significant. These effects are expressed as thermomechanical noise which in most cases determines the ultimate sensor performances. Also, adsorption and desorption (AD) of particles (atoms, molecules) on the surface of miniature vibrating structures generate the AD noise.Vibrating micro-and nanostructures are important not only for the new sensor components, but also for a multitude of other applications. As an illustration, I will mention a new generation of MEMS oscillators, which successfully replaces the traditional quartz oscillators in some contemporary applications. Also, a new generation of processors which utilize built-in miniature mechanical structures is envisioned.

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“…Fluctuations caused by monolayer AD processes in adsorption-based sensors using models assuming that the number of the analyte particles around the sensor is sufficiently high to consider the analyte pressure (or concentration) constant throughout the experiment have been analyzed in Djurić et al (2002Djurić et al ( , 2007 and Jakšić et al (2009). We will denote such models as the linear ones, because of the linear dependence of the instantaneous adsorption rate on the number of adsorbed particles.…”

Section: Introductionmentioning

confidence: 99%

A second-order nonlinear model of monolayer adsorption in refractometric chemical sensors and biosensors case of equilibrium fluctuations

Jokić

Jakšić

2016

Opt Quant Electron

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In adsorption-based chemical and biological refractometric sensors the dependence of the refractive index of the sensing area on the number of adsorbed particles is used for detection and quantification of analytes. We perform stochastic analysis of equilibrium fluctuations of the adsorbed particles number for monolayer adsorption using a nonlinear second-order model. We derive an analytical expression for the power spectral density (PSD) of the refractive index change fluctuations. Our theory is applicable to sensors operating in closed volume systems with spatially uniform analyte concentration. Our analysis of fluctuations in a benzene sensor shows a significant difference between the PSD according to the derived expression and the PSD obtained by the linear adsorption model, especially for very low amounts of analyte. The developed theory is valid in a wider range of pressures and temperatures. Since signal fluctuations determine the detection limit, the presented theoretical model is applicable as a tool for the design, optimization and characterization of practical adsorption-based refractometric sensors.

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Fluctuations of the number of particles and mass adsorbed on the sensor surface surrounded by a mixture of an arbitrary number of gases

Cited by 25 publications

References 16 publications

RF MEMS and NEMS components and adsorption-desorption induced phase noise

RF MEMS and NEMS components and adsorption-desorption induced phase noise

Micro- and nanosystems based on vibrating structures

A second-order nonlinear model of monolayer adsorption in refractometric chemical sensors and biosensors case of equilibrium fluctuations

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