Flowmetering for microfluidics

Cavaniol, Charles; Descroix, Stéphanie; Viovy, Jean‐Louis

doi:10.1039/d2lc00188h

Cited by 30 publications

(27 citation statements)

References 95 publications

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“…These commercial products utilize different thermal sensing principles that cover the three major technologies with thermal calorimetry, anemometry, and thermal time-of-flight, and some efforts of making micromachined and commercially available Coriolis sensors were also reported [ 12 ]. However, the complicated microfluidic process and the making process of the devices have greatly hindered the growth of flow-sensing products for microfluidics [ 113 ]. Besides the high commercial costs, the calorimetric and anemometric flow sensors require calibration with real fluid for desired precision or metrological accuracy.…”

Section: Applicationsmentioning

confidence: 99%

Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications

Huang¹

2022

Micromachines

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Micromachined thermal flow sensors on the market are primarily manufactured with the calorimetric sensing principle. The success has been in limited industries such as automotive, medical, and gas process control. Applications in some emerging and abrupt applications are hindered due to technical challenges. This paper reviews the current progress with micromachined devices based on the less popular thermal time-of-flight sensing technology: its theory, design of the micromachining process, control schemes, and applications. Thermal time-of-flight sensing could effectively solve some key technical hurdles that the calorimetric sensing approach has. It also offers fluidic property-independent data acquisition, multiparameter measurement, and the possibility for self-calibration. This technology may have a significant perspective on future development.

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Section: Applicationsmentioning

confidence: 99%

Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications

Huang¹

2022

Micromachines

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“…Typical configurations include anemometric, calorimetric, and time-of-flight sensors. 1 For commonly used thermal flow sensor materials such as Pt and Ni, 2 the temperature coefficient of resistance (TCR) is typically in the range of 7000 ppm K −1 . Strategies of increasing sensitivity mainly focus on maximizing heat transfer from the heating element to the sensing element through fluid transportation.…”

Section: Introductionmentioning

confidence: 99%

Microfluidic thermal flow sensor based on phase-change material with ultra-high thermal sensitivity

2023

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“…Many different mechanisms have been used to develop flow rate sensors for microfluidic applications (Nguyen 1997;Ejeian et al 2019;Cavaniol et al 2022). These mechanisms are classified as active and passive sensors depending on whether the sensor supplies energy to the fluid (Cavaniol et al 2022). Active sensors, based on thermal conductivity and Coriolis force, constitute the majority of the commercial devices.…”

Section: Introductionmentioning

confidence: 99%

On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

Secme

Pisheh

Tefek

et al. 2023

Microfluid Nanofluid

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Precise monitoring of fluid flow rates constitutes an integral problem in various lab-on-a-chip applications. While off-chip flow sensors are commonly used, new sensing mechanisms are being investigated to address the needs of increasingly complex lab-on-a-chip platforms which require local and non-intrusive flow rate sensing. In this regard, the deformability of microfluidic components has recently attracted attention as an on-chip sensing mechanism. To develop an on-chip flow rate sensor, here we utilized the mechanical deformations of a 220 nm thick Silicon Nitride membrane integrated with the microfluidic channel. Applied pressure and fluid flow induce different modes of deformations on the membrane, which are electronically probed by an integrated microwave resonator. The flow changes the capacitance, and in turn resonance frequency, of the microwave resonator. By tracking the resonance frequency, liquid flow was probed with the device. In addition to responding to applied pressure by deflection, the membrane also exhibits periodic pulsation motion under fluid flow at a constant rate. The two separate mechanisms, deflection and pulsation, constitute sensing mechanisms for pressure and flow rate. Using the same device architecture, we also detected pressure-induced deformations by a gas to draw further insight into the sensing mechanism of the membrane. Flow rate measurements based on the deformation and instability of thin membranes demonstrate the transduction potential of microwave resonators for fluid-structure interactions at micro-and nanoscales.

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Flowmetering for microfluidics

Abstract: Originally designed for chromatography, electrophoresis and printing technologies, microfluidics has found since then its applications in a variety of domain such as engineering, chemistry, environmental or life science.The fundamental underpinning...

Cited by 30 publications

References 95 publications

Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications

Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications

Microfluidic thermal flow sensor based on phase-change material with ultra-high thermal sensitivity

On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators

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