Flow compensation in a MEMS dual-thermal conductivity detector for hydrogen sensing in natural gas

Graaf, G. de; Prouza, A. Abarca; Wolffenbuttel, R.F.

doi:10.1109/transducers.2015.7181145

Cited by 4 publications

(2 citation statements)

References 7 publications

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“…Over the last few decades, the semiconductor industry has experienced exponential growth. Semiconductors are widely used in different sensing applications ranging from surveillance to medical devices, as well as environmental applications and beyond [1][2][3][4][5]. One of the most important results of this industry is the CMOS image sensor (CIS) [6,7].…”

Section: Introductionmentioning

confidence: 99%

A CMOS Image Sensor Dark Current Compensation Using In-Pixel Temperature Sensors

Abarca,

Theuwissen

2023

Sensors

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This paper presents a novel technique for dark current compensation of a CMOS image sensor (CIS) by using in-pixel temperature sensors (IPTSs) over a temperature range from −40 °C to 90 °C. The IPTS makes use of the 4T pixel as a temperature sensor. Thus, the 4T pixel has a double functionality, either as a pixel or as a temperature sensor. Therefore, the dark current compensation can be carried out locally by generating an artificial dark reference frame from the temperature measurements of the IPTSs and the temperature behavior of the dark current (previously calibrated). The artificial dark current frame is subtracted from the actual images to reduce/cancel the dark signal level of the pictures. In a temperature range from −40 °C to 90 °C, results show that the temperature sensors have an average temperature coefficient (TC) of 1.15 mV/°C with an inaccuracy of ±0.55 °C. Parameters such as conversion gain, gain of the amplifier, and ADC performance have been analyzed over temperature. The dark signal can be compensated in the order of 80% in its median value, and the nonuniformity is reduced in the order of 55%.

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Section: Introductionmentioning

confidence: 99%

A CMOS Image Sensor Dark Current Compensation Using In-Pixel Temperature Sensors

Abarca,

Theuwissen

2023

Sensors

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“…de Graaf et al suggested a deep and shallow groove design, which can compensate for the flow rate impaction effectively [25,26]. Whereas the thermal conductivity sensitivity is decreased due to offsetting the deep groove's output.…”

Section: Introductionmentioning

confidence: 99%

Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel

Wang¹,

Zhou²,

Wang³

et al. 2022

J. Micromech. Microeng.

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A novel micro-thermal conductivity detector (μTCD) with a semi-diffusion gas channel is demonstrated. This semi-diffusion channel can reduce the flow-rate interference significantly by lowering the gas flow velocity above the hot film and maintains fast response speed at the same time. Simulations indicate that the semi-diffusion type with triangular shape has the best flow-insensitive effect. When the temperature of the hot film is about 500K, the maximal temperature deviation of the hot film caused by flow rate change in this case can be decreased by 82.4% compared with the traditional straight type. Experiments are carried under the conditions of sample and carrier gas commonly used in gas chromatograph (GC), which is achieved by using He and CO2. With the sample gas flow ranging from 1 to 20sccm, the voltage deviation in the semi-diffusion type is reduced for as much as 85.1% of that in the straight type. This effect is also verified in binary gases with various thermal conductivities. In addition, the recovery time of the semi-diffusion design is almost the same as the straight type, less than 170ms, indicating it is suitable for the rapid gas detection in GC.

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Ultra-Low-Power, Extremely Stable, Highly Linear-Response Thermal Conductivity Sensor Based on a Suspended Device with Single Bare Pt Nanowire

Wu,

Zhang,

Chen

et al. 2024

ACS Sens.

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Flow compensation in a MEMS dual-thermal conductivity detector for hydrogen sensing in natural gas

Cited by 4 publications

References 7 publications

A CMOS Image Sensor Dark Current Compensation Using In-Pixel Temperature Sensors

A CMOS Image Sensor Dark Current Compensation Using In-Pixel Temperature Sensors

Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel

Ultra-Low-Power, Extremely Stable, Highly Linear-Response Thermal Conductivity Sensor Based on a Suspended Device with Single Bare Pt Nanowire

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