Floating zone growth of silicon in magnetic fields:

Dold, P.; Cröll, A.; Lichtensteiger, M.; Kaiser, T.; Benz, K.W.

doi:10.1016/s0022-0248(01)01491-9

Cited by 60 publications

(25 citation statements)

References 17 publications

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“…9, bottom): The microsegregation is minimized, the intensity of the compositional variations is considerably lower than in cases I. and II. The effect of the RMF on the microsegregation in Czochralski-grown crystals is similar to the results obtained for the FZ growth of silicon under the influence of an RMF [32]: The frequency of the dopant striations is shifted to higher values and at the same time, their intensity is reduced drastically. The higher convective intensity of the STD flows in the FZ case requires higher magnetic field strengths compared to the Czochralski growth of germanium.…”

Section: Effect Of An Rmf On the Microsegragationsupporting

confidence: 85%

Czochralski growth of doped germanium with an applied rotating magnetic field

Dold¹

2003

Cryst. Res. Technol.

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The influence of time-dependent buoyancy convection on the temperature field and the microsegregation during the Czochralski growth of doped germanium was investigated. For physical modelling, experiments with gallium melts have been carried out in the temperature range of 690 to 1000 °C. Growth experiments were performed in a 2 inch crucible. Temperature measurements in the melt revealed convective temperature fluctuations in the range of 1.5 K with a standard deviation of σ=0.3 K. The corresponding frequencies are f≤0.6 Hz. The facility was equipped with a rotating magnetic field (RMF) of B max =0.8 mT, adjustable in the range of 5 to 400 Hz. When the maximum field strength was applied, a uniform, azimuthal flow was induced and the germanium melt rotates with 60 rpm. The melt rotation generated by the RMF can completely replace crystal and/or crucible rotation. Growth under an applied RMF results in the lowest microsegregation, compared to the growth without magnetic field / without rotation or to the case when the crystal was rotated but no magnetic field was applied. Increasing the magnetic field strength continuously, the convective temperature fluctuations pass through an intermediated state, where their amplitude becomes even higher, before they are effectively reduced by the RMF. Dedicated to Professor K. W. Benz on the occasion of his 65th birthday.

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Section: Effect Of An Rmf On the Microsegragationsupporting

confidence: 85%

Czochralski growth of doped germanium with an applied rotating magnetic field

Dold¹

2003

Cryst. Res. Technol.

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“…In the present works, the thermophysical properties of the two kinds of fluids used are readily available in Table 1, the properties of which are in accordance with Dold, Cröll, Lichtensteiger, Kaiser, and Benz (2001).…”

Section: Boundary and Initial Conditionsmentioning

confidence: 80%

The effect of aspect ratio and axial magnetic field on thermocapillary convection in liquid bridges with a deformable free-surface

Zhang

Huang

Zhang

et al. 2015

Engineering Applications of Computational Fluid Mechanics

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Three-dimensional numerical simulations are performed to analyze the effect of the aspect ratio Ar and axial magnetic field on thermocapillary convection in liquid bridges with deformable freesurface under microgravity, in which the volume of fluid (VOF) method is adopted to track the free-surface movement. The simulation results elucidate that the oscillation wave number m and frequency of temperature fluctuation decrease with increasing Ar, while the amplitude of temperature fluctuation increases with increasing Ar. The deformation ratio ξ of the free-surface increases as Ar increases. The numerical results also reveal that the axial magnetic field causes a concentration of convection vortexes near the free-surface and effectively suppresses the flow in both the radial and axial directions. Moreover, the axial magnetic field effectively damps free-surface deformation, so that the deformation ratio ξ decreases as the Hartmann number Ha increases. The temperature displays a uniform and linear distribution along the free-surface and the axis of molten zone when B a = 0.3 T. ARTICLE HISTORYintensity of the applied axial magmatic fields (T) Ca Capillary number, Ca =

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“…The benefits of RMFs for the improvement of the radial resistivity distribution and the dopant homogeneity in radiation-heated FZ-silicon have been reported in Refs. [13,18]. Recently, a patent was given for the industrial process [19].…”

Section: Control Of Microsegregation By An Rmfmentioning

confidence: 99%

“…In the following, the main emphasis is put on the comparison of radio frequency (RF)-heated zones with the radiation-heated ones using mirror furnaces and analyzed in earlier works [10][11][12][13], especially in terms of: * convective temperature fluctuations in the melt, * frequency and intensity of microscopic dopant inhomogeneities, * control of time-dependent convection by means of external fields.…”

Section: Introductionmentioning

confidence: 99%

Floating zone growth of silicon in magnetic fields:

Cited by 60 publications

References 17 publications

Czochralski growth of doped germanium with an applied rotating magnetic field

Czochralski growth of doped germanium with an applied rotating magnetic field

The effect of aspect ratio and axial magnetic field on thermocapillary convection in liquid bridges with a deformable free-surface

Analysis of microsegregation in RF-heated float zone growth of silicon—comparison to the radiation-heated process

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