Floating-zone growth of silicon in magnetic fields. I. Weak static axial fields

Cröll, A.; Szofran, F. R.; Dold, P.; Benz, K. W.; Lehoczky, S. L.

doi:10.1016/s0022-0248(97)00485-5

Cited by 57 publications

(33 citation statements)

References 21 publications

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“…Floating zone experiments of 8 mm silicon crystal growth was conducted by Dolt et al, 1) the influence of the axial magnetic field on the formation of dopant striation was detected; a nearly striationfree crystal was grown with the axial magnetic field above 240 mT. Although the microscopic dopant inhomogeneities were reduced, a radial unsteadiness of the dopant concentration was observed under axial magnetic field.…”

Section: Introductionmentioning

confidence: 99%

Thermocapillary Convection of Liquid Bridge under Axisymmetric Magnetic Fields

2008

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Three-dimensional numerical simulation of thermocapillary flow in liquid bridge model is performed. The effects of the magnetic field, including both axial uniform magnetic field and axisymmetric non-uniform magnetic field generated by circle coil, on the thermocapillary flow of semiconductor melt are investigated. For a three-dimensional thermocapillary flow, the axial magnetic field and the axisymmetric nonuniform magnetic field suppress convection effectively, and the three-dimensional thermocapillary flow tends to become an axisymmetric one. Under axial magnetic field, the convection in central core region becomes very weak, and in the meantime, the energetic thermocapillary flow is squeezed toward free surface. While the axisymmetric non-uniform magnetic field generated by single coil is applied on the melt of liquid bridge, the convection structure is similar with that under axial magnetic field. By applying the axisymmetric CUSP magnetic field generated by two coils, convection structure depends on the symmetric plane position of two coils (SPPTC), the surface tension flow penetrates the whole liquid bridge and no stagnant core in the inner part of the melt is observed when SPPTC locates at z Ã ¼ 0:5, which is thought as a more favorable convection structure to alleviate radial dopant segregation in floating zone crystal growth.

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Section: Introductionmentioning

confidence: 99%

Thermocapillary Convection of Liquid Bridge under Axisymmetric Magnetic Fields

2008

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“…The control of the unsteady Marangoni flow has been an important topic in crystal growth, and has attracted extensive research over the years [2]. For silicon growth, magnetic fields have been known useful in suppressing the unsteady flows, so that a steady growth can be obtained and the grown crystal is striation free [1,3]. Both axial [1,3] and transversal magnetic fields [4,5] have been studied.…”

Section: Introductionmentioning

confidence: 99%

“…For silicon growth, magnetic fields have been known useful in suppressing the unsteady flows, so that a steady growth can be obtained and the grown crystal is striation free [1,3]. Both axial [1,3] and transversal magnetic fields [4,5] have been studied. To these experimental studies, numerical simulation should be useful to get a deeper understanding of the flow and segregation control by the magnetic field.…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional simulation of heat flow, segregation, and zone shape in floating-zone silicon growth under axial and transversal magnetic fields

Lan

Yeh

2004

Journal of Crystal Growth

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“…In the following, the main emphasis is put on the comparison of radio frequency (RF)-heated zones with the radiation-heated ones using mirror furnaces and analyzed in earlier works [10][11][12][13], especially in terms of: * convective temperature fluctuations in the melt, * frequency and intensity of microscopic dopant inhomogeneities, * control of time-dependent convection by means of external fields.…”

Section: Introductionmentioning

confidence: 99%

Floating-zone growth of silicon in magnetic fields. I. Weak static axial fields

Cited by 57 publications

References 21 publications

Thermocapillary Convection of Liquid Bridge under Axisymmetric Magnetic Fields

Thermocapillary Convection of Liquid Bridge under Axisymmetric Magnetic Fields

Three-dimensional simulation of heat flow, segregation, and zone shape in floating-zone silicon growth under axial and transversal magnetic fields

Analysis of microsegregation in RF-heated float zone growth of silicon—comparison to the radiation-heated process

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