Flip-flop sensors: a new class of silicon sensors

Lian, W.; Middelhoek, S.

doi:10.1016/0250-6874(86)80026-9

Cited by 23 publications

(7 citation statements)

References 4 publications

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“…If the mass is fluctuated by (7) (6) (8) white noise, then the direction of pull-in becomes stochastic, and the probability varies depending on the strain applied to the sensor. Using a massspring system with counterelectrode on both sides, if a voltage sufficient for pull-in is applied, then a bidirectionally unstable state is generated.…”

Section: Resultsmentioning

confidence: 99%

“…A previous paper reported a similar sensing principle using silicon transistors [8], but this sensor did not work at high temperature. This sensor is based on the principle that it depends on the physical quantity applied to the sensor to which direction the bidirectionally unstable state of an electromechanical system statistically tends to go, when the state is switched from a monostable state fluctuating with noise.…”

Section: Introductionmentioning

confidence: 99%

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A Stochastic Counting MEMS Sensor Using White Noise Oscillation for a High‐Temperature Environment

Hatakeyama

Esashi

Tanaka

2013

Elect Comm in Japan

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This paper describes a stochastic counting MEMS sensor that can be used in low-S/N environments such as high-temperature plants. A mass that vibrates between two counterelectrodes due to white voltage noise is "pulled-in" to either of the electrodes by the application of a pulse voltage to the mass. The direction of pull-in is stochastic, and the probability that the mass is pulled-in to a particular side depends on mechanical strain applied to the sensor structure. This sensing principle was confirmed by simulation, and the sensor was prototyped using an SOI wafer. Based on our experiment, the probability of pull-in to a particular side was tuned using a bias voltage applied to the counterelectrodes, as predicted by simulation. When the frequency of the pulse voltage for pull-in increases, the behavior of the sensor looks random as it is not intended, because the mass is pulled-in during damping vibration after being released from the previous pull-in. This limits the sensing speed, but strain sensing is possible by just counting the number of pull-ins to a particular side, which is easy even in low-S/N environments. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(9): 62-70, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com).

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Stochastic Counting MEMS Sensor Using White Noise Oscillation for a High‐Temperature Environment

Hatakeyama

Esashi

Tanaka

2013

Elect Comm in Japan

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“…Elata and Abu-Salih (2005) proposed, and experimentally validated (Abu-Salih and Elata 2006), to utilize the electromechanical buckling of the micro-bridge for determining the residual stress in micro-machined devices. In general, a sensor, which switches its operating state in reaction to the crossing of a threshold value of its input, is called Limit-switch sensor (Wilcox and Dankowicz 2011) or Flip-flop sensor (Lian and Middelhoek 1986). As an example, the pull-in of a beam has been used in a micro-machined voltage reference (Cretu et al 2001).…”

Section: Introductionmentioning

confidence: 99%

A passive mechanism for thermal stress regulation in micro-machined beam-type structures

2012

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“…Using the slope of the CDF, the magnitude of the input can be deduced from the counter value. The predicted sampling variance is [22]: where N is the number of measurement cycles and p and q are the probability for each side of the stochastic sensor to get a "1". This probability is close to 0.5 for our application.…”

Section: Flip-flop Stochastic Sensormentioning

confidence: 99%

“…This probability is close to 0.5 for our application. The probability for a "1" decision is given by [22]:…”

Section: Flip-flop Stochastic Sensormentioning

confidence: 99%

I/sub DDQ? test using built-in current sensing of supply line voltage drop

Xue

Walker

IEEE International Conference on Test, 2005.

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A practical built-in current sensor (BICS) is described that senses the voltage drop on supply lines caused by quiescent current leakage. This non-invasive procedure avoids any performance degradation. The sensor performs analog-to-digital conversion of the input signal using a stochastic process, with scan chain readout. Self-calibration and digital chopping are used to minimize offset and low frequency noise and drift. The measurement results of a 350 nm test chip are described. The sensor achieves a resolution of 182 µA, with the promise of much higher resolution.

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Flip-flop sensors: a new class of silicon sensors

Cited by 23 publications

References 4 publications

A Stochastic Counting MEMS Sensor Using White Noise Oscillation for a High‐Temperature Environment

A Stochastic Counting MEMS Sensor Using White Noise Oscillation for a High‐Temperature Environment

A passive mechanism for thermal stress regulation in micro-machined beam-type structures

I/sub DDQ? test using built-in current sensing of supply line voltage drop

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