Flexible Nanoscale Amorphous Oxide Transistors with a Gold-Assisted Transfer Method
Sumaiya Wahid,
Alwin Daus,
Victoria Chen
et al.
Abstract:We present a new approach to achieve nanoscale transistors on ultrathin flexible substrates with conventional electron-beam lithography. Full devices are first fabricated on a gold sacrificial layer covering a rigid silicon substrate, and then coated with a polyimide film and released from the rigid substrate. This approach bypasses nanofabrication constraints on flexible substrates: (i) electron-beam surface charging, (ii) alignment inaccuracy due to the wavy substrate, and (iii) restricted thermal budgets. A… Show more
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