Flexible Implantable Microtemperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography With Multilayer Alignment for Biomedical Applications

Yang, Zhuoqing; Zhang, Yi; Itoh, Toshihiro; Maeda, Ryutaro

doi:10.1109/jmems.2013.2269674

Cited by 36 publications

(27 citation statements)

References 18 publications

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“…Otherwise, it is difficult to obtain continuous and smooth PR film surface. In addition, the effect of process parameters in the spray coating on the quality of PR film on tube surface has been fully studied in our previous work [3,4]. Figure 4 shows the sketch of the developed UV lithography system for tube surface.…”

Section: Spray Coating System For Cylindrical Substratementioning

confidence: 99%

“…This equipment can be used not only for tube exposure but also for those similar cylindrical substrates, such as optical fibers, capillary, metal or fabric wires, etc. The working principle of the developed lithography system can be found in our previous works [4,5].…”

Section: Uv Projection Lithography System For Cylindrical Substratementioning

confidence: 99%

“…Obtaining the microtemperature sensor after removing the residual PR film by acetone solution. The detailed fabrication process steps of the sensor can be found in our previous report [15].…”

Section: Flexible Implantable Microtemperature Sensormentioning

confidence: 99%

“…The sputtering condition is the vacuum 7.0 × 10 −4 Pa, the purity of Ar gas 99.9%, the purity of Pt target 99.99%, and sputtering power 100 W. The fabrication process steps of the microtemperature sensor are described in our previous work [15].…”

Section: Thin Film Processes -Artifacts On Surface Phenomena and Techmentioning

confidence: 99%

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Lab-on-a-Tube Surface Micromachining Technology

Yang¹,

Zhang²

2017

Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets

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In this chapter, the lab-on-a-tube surface micromachining technology will be used to fabricate a flexible implantable microtemperature sensor for hyperthermia application and a three-electrode system on a polymer tube surface for glucose monitoring application. This micromachining process is based on two homemade equipments: a spray coating equipment and a programmable UV 3D projection lithography system with alignment. In the spray coating system, there is a heater nozzle next to the spray nozzle for real-time heating. Pure nitrogen is flowed through the heater nozzle, warmed up and sprayed onto the tube substrate surface. The programmable UV lithography equipment for cylindrical substrate mainly consists of four parts: a uniform illumination system, a reduced projection lithography system, a synchronized motion stage system, and a Charge-Coupled Device (CCD) multilayer alignment system which is used to observe simultaneously the projected mask's patterns and those ever fabricated on the tube. Using the developed labon-a-tube surface micromachining technology, an implantable flexible microtemperature sensor and a three-electrode microstructure are successfully fabricated on the flexible polymer tube with 330 μm outer diameter, respectively. The test temperature coefficient of resistance (TCR) of the temperature sensor is 0.0034/°C. The measured cyclic voltammetry curve shows that the three-electrode system has a good redox property.

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Section: Spray Coating System For Cylindrical Substratementioning

confidence: 99%

Section: Uv Projection Lithography System For Cylindrical Substratementioning

confidence: 99%

Section: Flexible Implantable Microtemperature Sensormentioning

confidence: 99%

Section: Thin Film Processes -Artifacts On Surface Phenomena and Techmentioning

confidence: 99%

See 2 more Smart Citations

Lab-on-a-Tube Surface Micromachining Technology

Yang¹,

Zhang²

2017

Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets

Self Cite

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“…However, simple, precise, large-scale and high-yield fabrication of highperformance helical antennas that are compact but remain impedance matched to standard 50 Ω electronics is challenging and has not yet been achieved, thus preventing the commercial realization of smart implants. For instance, the necessity of impedance matching does not allow to use microantennas, which are realized by printing technologies 22,23,29 or folding 30 without the use of additional matching components. The use of impedance matching elements increases the footprint, price and number of technological steps per antenna fabrication sequence.…”

Section: Introductionmentioning

confidence: 99%

Compact helical antenna for smart implant applications

2015

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Smart implants are envisioned to revolutionize personal health care by assessing physiological processes, for example, upon wound healing, and communicating these data to a patient or medical doctor. The compactness of the implants is crucial to minimize discomfort during and after implantation. The key challenge in realizing small-sized smart implants is high-volume cost-and time-efficient fabrication of a compact but efficient antenna, which is impedance matched to 50 Ω, as imposed by the requirements of modern electronics. Here, we propose a novel route to realize arrays of 5.5-mm-long normal mode helical antennas operating in the industry-scientific-medical radio bands at 5.8 and 2.4 GHz, relying on a self-assembly process that enables large-scale high-yield fabrication of devices. We demonstrate the transmission and receiving signals between helical antennas and the communication between an antenna and a smartphone. Furthermore, we successfully access the response of an antenna embedded in a tooth, mimicking a dental implant. With a diameter of~0.2 mm, these antennas are readily implantable using standard medical syringes, highlighting their suitability for in-body implant applications.

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TiO₂ thin film patterns prepared by chemical vapor deposition and atomic layer deposition using an atmospheric pressure microplasma printer

Aghaee

Verheyen

Stevens³

et al. 2019

Plasma Processes & Polymers

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A microplasma printer is employed to deposit thin film patterns of TiO2 by titanium tetra‐isopropoxide and N2/O2 plasma at atmospheric pressure. The setup is adopted to carry out deposition in two configurations, namely under chemical vapor deposition (CVD) and atomic layer deposition (ALD) modes. The properties of TiO2, as well as the patterning resolution, are investigated. The amorphous TiO2 deposited in the CVD mode contains a relatively high level of impurities (residual carbon content of 5–10 at.%) and is characterized by a low refractive index of 1.8. With the ALD mode on the other hand, TiO2 is obtained with a low level of impurities (<1 at.% C and <2 at.% N), a refractive index of 1.98, and a growth per cycle of 0.15 nm. Furthermore, the spatial resolution for a 8‐nm‐thick film is determined by X‐ray photoelectron spectroscopy line scan and found to be equal to 2,000 and 900 µm for the CVD and ALD modes, respectively. This study can be regarded as the first step toward area‐selective CVD and ALD of TiO2 by a microplasma printer, which can be further explored and extended to other material systems.

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Flexible Implantable Microtemperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography With Multilayer Alignment for Biomedical Applications

Cited by 36 publications

References 18 publications

Lab-on-a-Tube Surface Micromachining Technology

Lab-on-a-Tube Surface Micromachining Technology

Compact helical antenna for smart implant applications

TiO₂ thin film patterns prepared by chemical vapor deposition and atomic layer deposition using an atmospheric pressure microplasma printer

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Flexible Implantable Microtemperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography With Multilayer Alignment for Biomedical Applications

Cited by 36 publications

References 18 publications

Lab-on-a-Tube Surface Micromachining Technology

Lab-on-a-Tube Surface Micromachining Technology

Compact helical antenna for smart implant applications

TiO2 thin film patterns prepared by chemical vapor deposition and atomic layer deposition using an atmospheric pressure microplasma printer

Contact Info

Product

Resources

About

TiO₂ thin film patterns prepared by chemical vapor deposition and atomic layer deposition using an atmospheric pressure microplasma printer