Flexible capacitive sensors for high resolution pressure measurement

Pritchard, Emily; Mahfouz, Mohamed R.; Evans, Barbara R.; Eliza, Sazia A.; Haider, Mohammad Rafiqul

doi:10.1109/icsens.2008.4716726

Cited by 49 publications

(33 citation statements)

References 10 publications

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“…Sensing becomes difficult to resume, thus affecting subsequent measurements. By contrast, sensors with a PDMS layer perform better, because of the elasticity of the interlayer [17]. In particular, we combine the advantages of these two designs, improve upon their shortcomings, and then propose a new structure with a micro-needle array layer as the dielectric layer so as to improve the sensor performance.…”

Section: Capacitive Sensor Designmentioning

confidence: 94%

High precision intelligent flexible grasping front-end with CMOS interface for robots application

Zhang

Liu

et al. 2016

Sci. China Inf. Sci.

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This paper presents a high-precision intelligent flexible robot grasping front-end with an integrated capacitive tactile sensor array and a conditioning chip. The capacitive tactile sensor is the primary part of the front-end, it determines the overall performance. The micro-needle array sandwich structure in the tactile sensor increases the repeatability and stability, and ensures the sensitivity. The assembled sensor exhibits a saturation at 10.53 N (421 kPa) with a sensitivity of 1.9%/kPa. Furthermore, a conditioning chip is utilized in a custom readout interface to achieve better performance by reducing signal attenuation, and to increase the compatibility of the front-end. The chip is optimized for the parasitic shunt capacitance in the capacitor array. A dual bidirectional charge-discharge conversion method and a two-port detection method are matched to achieve the goal of reducing the shunting influence, and attenuating the offset voltage or the noise input effects. A prototype of the interface has been fabricated using 180-nm CMOS technology. Sensor with the value of 0.5 pF shunted by capacitors of 47 pF has been detected with an error of 1% within 100 µs.Keywords Capacitive sensor array, flexible sensor, tactile sensor, micro-needle array, bionic robot CitationHu X H, Zhang X, Liu M, et al. High precision intelligent flexible grasping front-end with CMOS interface for robots application. Sci China Inf Sci,

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Section: Capacitive Sensor Designmentioning

confidence: 94%

High precision intelligent flexible grasping front-end with CMOS interface for robots application

Zhang

Liu

et al. 2016

Sci. China Inf. Sci.

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“…After repeatedly pressing measurements, the elastane of the device decreases, making it difficult to return to its original state, thus affecting subsequent testing. Sensors with PDMS layers perform relatively better for its elastic material of the interlayer [11]. Furthermore, the elastane of this proposed sensor depends on not only the material, but also the structure itself, which brings a significant progress in repeatability and stability.…”

Section: Designmentioning

confidence: 96%

A flexible capacitive tactile sensor array with micro structure for robotic application

Zhang

Liu

et al. 2014

Sci. China Inf. Sci.

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A flexible capacitive tactile sensor array with micro needle structure is proposed in this paper for robotic application. Micro needle layer made of polydimethylsiloxane (PDMS) is sandwiched between the upper electrode layer made of PDMS and the bottom electrode layer fabricated on polyester (PET) film. The PDMS material renders the device adequate flexibility as it can be rolled into a cylinder. The single cell size in the fabricated 4 × 4 sensors array is 0.7 × 0.5 cm 2 and the initial capacitance of each cell is 0.86 pF. The fabricated cell shows a sensitivity of 3.26%/mN within the full scale range of 1 kPa. The micro needle structure gives better repeatability and stability. The maximum error during each measurement is about 3.2%, while the minimum error is about 1.2%. CitationHu X H, Zhang X, Liu M, et al. A flexible capacitive tactile sensor array with micro structure for robotic application.

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“…In [78], Pritchard et al demonstrate arrays of capacitive sensors that are fabricated directly on flexible thin films of polyimide with thicknesses down to 25 m. Here, each capacitive sensor consists of two circular evaporated gold plates with an intermediate parylene dielectric layer. The sensors show a linear response to applied pressure, and arrays of 5 sensors with 500 m diameter and 1 mm pitch give an output between 0.02 and 0.04 pF for an applied pressure of 700 kPa.…”

Section: Capacitive Sensorsmentioning

confidence: 98%