Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

Abstract

We fabricated highly adherent and electrically conductive micropatterns on SU-8 by supersonic cluster beam deposition (SCBD). This technique is based on the acceleration of neutral metallic nanoparticles produced in the gas phase. The kinetic energy acquired by the nanoparticles allows implantation in a SU-8 layer, thus producing a metal-polymer nanocomposite thin layer. The nanocomposite shows ohmic electrical conduction and it can also be used as an adhesion layer for further metallization with a metallic overlayer. We characterized the electrical conduction, adhesion and biocompatibility of microdevices obtained by SCBD on SU-8 demonstrating the compatibility of our approach with standard lift off technology on 4'' wafer. A self-standing and flexible Micro Electrode Array has been produced. Cytological tests with neuronal cell lines demonstrated an improved cell growth and a spontaneous confinement of cells on the nanocomposite layer.

High-throughput shadow mask printing of passive electrical components on paper by supersonic cluster beam deposition

“…[15][16][17] In particular, we have shown that this approach called supersonic cluster beam deposition (SCBD) can be efficiently used for the fabrication of electrically conductive patterned structures and devices on a wide variety of substrates, including polymers. 18,19 Here we present the rapid and reproducible parallel fabrication of sets of resistors and capacitors on paper by using SCBD and a shadow mask.…”

Stretchable nanocomposite electrodes with tunable mechanical properties by supersonic cluster beam implantation in elastomers

“…10,11 This process, called supersonic cluster beam implantation (SCBI), avoids both sample heating and charging and it is fully compatible with stencil mask micropatterning and liftoff technology. 11,12 Stretchable electrodes obtained by Au nanoparticles (NPs) implantation in polydimethylsiloxane (PDMS) are able to withstand more than 1 Â 10 6 of uniaxial stretching cycles (at 40% strain) preserving finite and reproducible electrical resistance. 10 Here, we demonstrate the fabrication of electrodes based on Au/PDMS nanocomposite with a Young's modulus depending solely on the amount of metal clusters implanted in the elastomeric matrix.…”

Phenotypic and Transcriptional Modulation of Human Pluripotent Stem Cells Induced by Nano/Microfabrication Materials

“…It is well known that the order of sensitivity for an optical cationic polymerization initiator depends on the anion type, which is in the order antimony, arsenic, phosphorus, and boron. However, there have been only a few reports on negative PRs' biocompatibility25–28 and there is a safety concern with respect to the effects of an Sb initiator on cell proliferation 18…”