Analysis of high-resolution EDS particle X-ray emission spectra is typically more complex than standard Si(Li) detector spectra analysis because of the need to carefully account for contributions from minor and satellite transitions. In this work, a pure Yb 2 O 3 sample was irradiated at the high-resolution high-energy-particle X-ray emission setup of C 2 TN, and simultaneous CdTe and X-ray microcalorimeter spectrometer spectra were collected covering both L and K lines. The Yb 2 O 3 high-resolution spectrum was analysed using the DT2 code that allows to include in the fitting model both diagram lines as well as multi-ionisation satellites, radiative auger emission, energy shifted lines (chemical effects) and any other contributions. In this communication, we present the results of the fit of the high-resolution Yb 2 O 3 spectrum and discuss details and problems related to the transitions energy, intensity and line width data.