Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique

Abstract

This paper presents a method for measuring five-degrees-of-freedom errors of a moving stage with a monolithic prism and phase-sensitive detection technique. It consists of a pigtailed laser diode, three position-sensitive detectors (PSDs), a monolithic prism, and additional optical and electronic components. The monolithic prism mounted on the moving stage generates three beams that are detected by three PSDs, respectively, so that the straightness, pitch, yaw, and roll errors can be simultaneously measured. Theoretical analysis of each error measurement process is presented. To reduce the influence of disturbing light, the laser diode is modulated by a sinusoidal wave current, and a phase-sensitive detection technique is developed to demodulate the signals. Compared with a laser interferometer, the deviation errors when measuring the horizontal and vertical straightness errors are better than ±0.25 and ±0.4 μm, respectively. The deviation errors for the pitch, yaw, and roll are better than ±0.5, ±0.3, and ±2 arc sec, respectively, in comparison with an autocollimator. The system can be assembled to measure five error components of machine tools in an industrial environment.

Embedded Sensor System for Five-degree-of-freedom Error Detection on Machine Tools

“…Feng and Cui [10][11][12][13] et al developed a series of 2-beam 6-DOF measurement system. Huang [17] developed a 2-beam 5-DOF measurement system based on a monolithic prism to generate a pair of parallel laser beam.…”

A Geometric Error Measurement System for Linear Guideway Assembly and Calibration

“…Jywe et al [15] developed a novel optical calibration system using two sets of QDs and one ball lens module to obtain the total error associated with simultaneous multi-axis movements of CNC machine tools. Huang et al [16] utilized a method for measuring 5-DOF errors of a moving stage with a monolithic prism and three PSDs. Yan et al [17] proposed a laser straightness interferometer system that is able to compensate the rotational error and simultaneously detect the 6-DOF error of a linear stage by using one PSD, two QDs, one Wollaston prism, one corner cube, and other optical components.…”

“…Therefore, two methods are proposed in this study for calibrating the above altitude angle: The first method is designed for ease of use based on Michelson principle using a laser interferometer as the light receiver, and the second one is aimed for high calibration repeatability based on autocollimator principle using QD to replace the light receiver. The literature mentioned above (e.g., Ni et al [7], Fan et al [11], Huang et al [16], and Yan et al [17]) proposed an MDFM system for single axis motion, respectively. However, these systems were composed with large numbers of optical lenses or optical components, which were difficult to setup and use in fabrication site of the factory.…”

Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system

“…Multi degree-of-freedom (DOF) error simultaneous measurement method and system is urgently needed and preferably adopted in machine tool calibration due to its high efficiency and easy assembly [1][2][3][4][5][6][7][8][9][10]. A simple system for simultaneously measuring six DOF geometric motion errors of a linear guide was developed in our previous work [11].…”