FISH &amp; amp; CHIPS: Four Electrode Conductivity / Salinity Sensor on a Silicon Multi-Sensor Chip for Fisheries Research

Hyldgård, Anders; Olafsdottir, I.; Olesen, M.; Hedegaard, T.; Hansen, Ole; Thomsen, Erik Vilain

doi:10.1109/icsens.2005.1597902

Cited by 19 publications

(13 citation statements)

References 5 publications

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“…The silicon multi-sensor is fabricated using conventional bulk micromachining [8,9] including ion-implantation to functionalize the silicon. Thermally grown SiO 2 and deposited Si 3 N 4 Fig.…”

Section: Sensor Chip Design and Fabricationmentioning

confidence: 99%

Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

Hyldgård

Birkelund

Janting

et al. 2008

Sensors and Actuators A: Physical

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Section: Sensor Chip Design and Fabricationmentioning

confidence: 99%

Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

Hyldgård

Birkelund

Janting

et al. 2008

Sensors and Actuators A: Physical

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“…There are quite a few examples reported in the literature [2,3,4,5,6,7,8,9,10,11,12], where multiple sensors have been integrated on a single MEMS chip. Generally, the need to cluster more than one sensor on a chip arises when the investigators are designing a sensor system intended for a specific industrial/scientific application.…”

Section: Introductionmentioning

confidence: 99%

“…In addition to the previous examples, sensor systems designed for laboratory and medical applications sensing temperature, fluid density and mass flow rate [4] and fish behaviour and migration movements monitoring light, pressure, temperature and conductivity [11] were also reported. Simultaneous utilization of multiple sensors for monitoring flow velocity, direction and ambient temperature on a single chip has also been demonstrated by Ma et al [6].…”

Section: Introductionmentioning

confidence: 99%

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

Mansoor

Haneef

Akhtar

et al. 2016

Sensors

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An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA–0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C–1.79 mV/°C in the range 20–300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(Vexcit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min)−0.1 in the tested range of 0–4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries.

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“…The four sensors gives together information about the salinity of the water, depth, temperature, day and night together with information about longitude and latitude. The performance of the four sensors is described and analysed in details elsewhere [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Enhanced polymeric encapsulation for MEMS based multi sensors for fisheries research

Birkelund

Nørgaard

Thomsen

2011

Sensors and Actuators A: Physical

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FISH & amp; CHIPS: Four Electrode Conductivity / Salinity Sensor on a Silicon Multi-Sensor Chip for Fisheries Research

Cited by 19 publications

References 5 publications

Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

Enhanced polymeric encapsulation for MEMS based multi sensors for fisheries research

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