First results on torque estimation by FEA and experimental analysis in a novel CSFH-based microgripper

Abstract

Microgrippers (MGs) are MEMS devices that can manipulate cells and microscopic objects. In this work an approach based on both experimental and a finite element analysis is proposed with the aim of evaluating the torque exerted by the micro-actuator of a novel prototype of MG equipped with electrostatic rotary comb-drives and Conjugate Surface Flexure Hinges (CSFHs) when powered by a 0-20 V peak-topeak supply voltage. The angular displacement of the micro-actuator has been measured using an image analysis method implemented by the Authors from videos acquired by a camera on a trinocular optical microscope, while the hinge stiffness has been estimated using numerical simulations: the obtained results show that the comb-drive can apply a maximum torque of 1.4 ± 0.2 nNm.