Nanotribological characteristics, including the coefficient of friction, wear coefficient, and wear resistance, of Cu 6 Sn 5 , Cu 3 Sn, and Ni 3 Sn 4 intermetallic compounds developed by the annealing of Sn-Cu or Sn-Ni diffusion couples were investigated in this work. The scratch test conditions combined a constant normal load of 10 mN, 20 mN, or 30 mN and a scratch rate of 0.1 lm/s, 1 lm/s, or 10 lm/s. Experimental results indicated that, as the normal load increases, the pile-up grows taller and the scratch deepens, leading to a greater coefficient of friction and wear coefficient, and reduced wear resistance. Moreover, the scratch rate does not have a significant effect on the nanotribological characteristics except for those of Cu 6 Sn 5 and Cu 3 Sn under a normal load of 10 mN. Though the hardness of Cu 6 Sn 5 , Cu 3 Sn, and Ni 3 Sn 4 is similar, Ni 3 Sn 4 appears to be more prone to wear damage.