First autonomous wireless sensor node powered by a vacuum-packaged piezoelectric MEMS energy harvester

Elfrink, R.; Pop, V.; Hohlfeld, Dennis; Kamel, Talal M.; Matova, S.; Nooijer, C. de; Jambunathan, M.; Goedbloed, M.H.; Caballero, Luis Camacho; Renaud, M.; Penders, Julien; Schaijk, R. van

doi:10.1109/iedm.2009.5424300

Cited by 33 publications

(18 citation statements)

References 3 publications

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“…9(a), at a normal urban driving speed 60 km/h (500 r/min), different load resistors are connected to the energy harvester system. When the load resistance is 0.6 MΩ, a peak output power 36 μW is achieved, which is suitable for the minimum power requirement of the TPMS application (<10 μW) [36]. According to Jacobi's law, this also reveals that the system impedance is ∼0.6 MΩ.…”

Section: Resistance Optimization and Output Power Testingmentioning

confidence: 96%

A Seesaw-Structured Energy Harvester With Superwide Bandwidth for TPMS Application

Parmar

Lee

2014

IEEE/ASME Trans. Mechatron.

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In this paper, we introduce a novel seesaw-structured energy harvester for tire-pressure monitoring system (TPMS) applications. The unique design of the proposed energy harvester can effectively avoid the influence of enormous centrifugal force, which is attributed to the balance characteristic of seesaw structure. Two magnets placed on the seesaw end could swing the seesaw structure in every rotating cycle with the help of external noncontact magnetic repulsive force, and subsequently this unbalanced seesaw structure impacts the polyvinylidene difluoride (PVDF) cantilevers to generate the power. A miniature energy harvester prototype is fabricated using a 3-D printing technique. In the performance testing experiment, a peak voltage of 4.6 V and a constant peak output power of 36 μW with the optimized load resistance value of 0.6 MΩ are achieved within a superwide rotating frequency range of 215-965 r/min (25.7-115.4 km/h for a real car). Moreover, an average power per second is 5.625 μW at 750 r/min, which could be potential power supply for the TPMS application.

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Section: Resistance Optimization and Output Power Testingmentioning

confidence: 96%

A Seesaw-Structured Energy Harvester With Superwide Bandwidth for TPMS Application

Parmar

Lee

2014

IEEE/ASME Trans. Mechatron.

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“…For integration of piezoelectric materials on silicon, various thin and thick film deposition techniques have been developed to date, including sputtered AlN [11][12], screen-printed PZT [13], sol-gel PZT [14][15][16], aerosol PZT [17], and others. However, in addition to their individual fabrication challenges, these deposited films are generally limited in their maximum allowable film thicknesses (2-5 µm), and show poor piezoelectricity compared to commercially available bulk ceramics.…”

Section: Piezoelectric Resonant Energy Harvestermentioning

confidence: 99%

Microsystems for energy harvesting

Najafi

Galchev

Aktakka

et al. 2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

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This paper reviews the state of the art in miniature microsystems for harvesting energy from external environmental vibration, and describes two specific microsystems developed at the University of Michigan. One of these microsystems allows broadband harvesting of mechanical energy from extremely low frequency (1-5 Hz) random vibrations abundant in civil infrastructure, such as bridges. These parametric frequency increased generators have a combined operating range covering two orders of magnitude in acceleration (0.54-19.6 m/s 2 ) and a frequency range spanning up to 60Hz, making them some of the most versatile harvesters in existence. The second of these systems is an integrated microsystem for harvesting energy from periodic vibrations at moderate frequencies (50-400 Hz) typically present in devices such as motors or transportation systems. This harvester utilizes a thinned-PZT structure to produce 2.74 µW at 0.1 g (167 Hz) and 205 µW at 1.5 g (154 Hz) at resonance. Challenges in the design of electronic circuitry (integrated or hybrid) for regulating the scavenged energy are briefly discussed.

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“…Dongna Shen [13] fabricated MEMS piezoelectric cantilever beam energy harvester which has seismic mass on the end and very low frequency and higher efficiency to harvest energy. R. Elfrink [14] studied chip-level vacuum package micro energy harvester which increased the output power exceed 100 times. Alex Mathers [15] designed and fabricated a cantilever beam harvester made of PDMS and PMN-PT.…”

Section: Related Workmentioning

confidence: 99%