Finite element modeling for chemical mechanical polishing process under different back pressures

Lin, Yeou-Yih; Lo, Ship-Peng

doi:10.1016/s0924-0136(03)00767-2

Cited by 39 publications

(19 citation statements)

References 6 publications

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“…The finite element method (FEM) is a numerical and computer based technique of solving a variety of practical engineering problems that arise in different fields such as, in heat transfer, fluid mechanics (Srinivasa Raju et al 2015;Bhargava and Rana, 2011;Sheri and Raju, 2015, Sheri and Raju , 2016, Sivaiah and Raju, 2013, chemical processing (Lin and Lo, 2003)), rigid body dynamics (Dettmer and Peric, 2006), solid mechanics (Hansbo and Hansbo, 2003), and many other fields. It is recognized by developers and users as one of the most powerful numerical analysis tools ever devised to analyze complex problems of engineering.…”

Section: Finite Element Methods (Fem)mentioning

confidence: 99%

MHD Casson Viscous Dissipative Fluid Flow Past a Vertically Inclined Plate in Presence of Heat and Mass Transfer: A Finite Element Technique

Raju¹,

Reddy²,

G³

2017

Frontiers in Heat and Mass Transfer

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Section: Finite Element Methods (Fem)mentioning

confidence: 99%

MHD Casson Viscous Dissipative Fluid Flow Past a Vertically Inclined Plate in Presence of Heat and Mass Transfer: A Finite Element Technique

Raju¹,

Reddy²,

G³

2017

Frontiers in Heat and Mass Transfer

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“…The Finite Element Method (FEM) is a computer-based and numerical scheme which is used for solving a different kind of practical engineering problems that occur in many fields, such as heat transfer, fluid mechanics [21], chemical processing [22], rigid body dynamics [23], solid mechanics [24], and many other fields. The system of ODE given by Eqs (2.12)-(2.16) and (2.17), (2.18) is solved using the FEM, which is a robust technique for numerical simulation.…”

Section: Finite Element Methodsmentioning

confidence: 99%

Fem Simulation of Triple Diffusive Natural Convection Along Inclined Plate in Porous Medium: Prescribed Surface Heat, Solute and Nanoparticles Flux

Goyal

Bhargava

2017

International Journal of Applied Mechanics and Engineering

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In this paper, triple diffusive natural convection under Darcy flow over an inclined plate embedded in a porous medium saturated with a binary base fluid containing nanoparticles and two salts is studied. The model used for the nanofluid is the one which incorporates the effects of Brownian motion and thermophoresis. In addition, the thermal energy equations include regular diffusion and cross-diffusion terms. The vertical surface has the heat, mass and nanoparticle fluxes each prescribed as a power law function of the distance along the wall. The boundary layer equations are transformed into a set of ordinary differential equations with the help of group theory transformations. A wide range of parameter values are chosen to bring out the effect of buoyancy ratio, regular Lewis number and modified Dufour parameters of both salts and nanofluid parameters with varying angle of inclinations. The effects of parameters on the velocity, temperature, solutal and nanoparticles volume fraction profiles, as well as on the important parameters of heat and mass transfer, i.e., the reduced Nusselt, regular and nanofluid Sherwood numbers, are discussed. Such problems find application in extrusion of metals, polymers and ceramics, production of plastic films, insulation of wires and liquid packaging.

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“…Finite Element Method The finite element method (FEM) is a numerical and computer based technique of solving a variety of practical engineering problems that arise in different fields such as, in heat transfer, fluid mechanics (Bhargava and Rana (2011)), chemical processing (Lin and Lo (2003)), rigid body dynamics (Dettmer and Peric (2006)), solid mechanics (Hansbo and Hansbo (2004)), and many other fields. It is recognized by developers and users as one of the most powerful numerical analysis tools ever devised to analyze complex problems of engineering.…”

Section: Numerical Solution By Galerkin Finite Element Methodsmentioning

confidence: 99%

Application of Finite Element Method to MHD Mixed Convection Chemically Reacting Flow past a Vertical Porous Plate with Cross Diffusion and Biot Number Effects

Raju¹

2017

AJHMT

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A numerical solution to the problem of mixed convective MHD chemically reacting flow past a vertical porous plate in the presence of thermal radiation and cross diffusion effects was studied. Instead of the commonly used conditions of constant surface temperature or constant heat flux, a convective boundary condition is employed which makes this study unique and the results more realistic and practically useful. The momentum, energy, and concentration equations derived as coupled second-order, ordinary differential equations and are solved numerically using a highly accurate and thoroughly tested finite element method. The effects of Grashof number (defined to represent a mixed convection parameter) for heat and mass transfer, Soret number, Dufour number, Viscous dissipation parameter, Chemical reaction parameter, Permeability parameter, Thermal radiation parameter and Biot number on the velocity, temperature and concentration profiles are illustrated and interpreted in physical terms. The present results agree closely with the existing results for the special cases of the problem. This close agreement lends support to the validity of the present analysis and the accuracy of the numerical computations. The paper also contains a table in which the data for the local skin friction, local Nusselt number and local Sherwood number are provided for various combination values of the parameters that govern the momentum, energy and concentration convey in the mixed boundary layer.

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Finite element modeling for chemical mechanical polishing process under different back pressures

Cited by 39 publications

References 6 publications

MHD Casson Viscous Dissipative Fluid Flow Past a Vertically Inclined Plate in Presence of Heat and Mass Transfer: A Finite Element Technique

MHD Casson Viscous Dissipative Fluid Flow Past a Vertically Inclined Plate in Presence of Heat and Mass Transfer: A Finite Element Technique

Fem Simulation of Triple Diffusive Natural Convection Along Inclined Plate in Porous Medium: Prescribed Surface Heat, Solute and Nanoparticles Flux

Application of Finite Element Method to MHD Mixed Convection Chemically Reacting Flow past a Vertical Porous Plate with Cross Diffusion and Biot Number Effects

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