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ABSTRACTWe discuss a finite element approximation of the semiconductor continuity equations based on quadrilateral and hexahedral space discretizations. This method can be regarded as an extension to higher dimensions of the well-known onedimensional Scharfetter-Gummel scheme. The existence, uniqueness and error estimates of the solution is discussed. Using a lumping technique we get a linear system similar to that obtained from the conventional box-scheme. We also discuss the evaluation of the approximate terminal currents, which are shown to be convergent and conservative.