Finite Element Method Design and Fabrication of Thermo-sensitive Quartz Tuning Fork Resonators as Temperature Sensor

Xu, Jing; You, Bo

doi:10.1109/nems.2006.334704

Cited by 3 publications

(3 citation statements)

References 14 publications

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“…So far, only a few studies have been found [18,25–29] with respect to QTFs. In [18,26] a modal analysis and calculation of the static capacitance for an optimum design is reported. In [25] the modal analysis of the sensor is reported.…”

Section: Introductionmentioning

confidence: 99%

Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices

Oria

Otero

González

et al. 2013

Sensors

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Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.

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Section: Introductionmentioning

confidence: 99%

Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices

Oria

Otero

González

et al. 2013

Sensors

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show abstract

“…According to Bechmann's research, the third-order temperature-frequency characteristic of quartz crystal is shown in formula (17) [27].…”

Section: Quartz Tuning Fork Parameter Extraction Experimentsmentioning

confidence: 99%

New Measurement Method of Viscosity, Density, and Dielectric Constant of Transformer Oil Based on Quartz Tuning Fork

Chen

Ding

et al. 2022

IEEE Sensors J.

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Transformer oil is a liquid insulating material used in ultra-high voltage power equipment such as oil-immersed transformers and reactors. Online monitoring of its characteristics helps to maintain the status of power equipment. Aiming at the problem of single detection parameter in traditional methods, a new detection method for density, viscosity and dielectric constant based on quartz tuning fork is proposed in this paper. Firstly, by analyzing the working mechanism of the quartz tuning fork, the sensor detection model and parameter extraction method in air are constructed based on the equivalent circuit model of the Butterworth-Van Dyke model. Then, the working mechanism of the density, viscosity and dielectric constant of the transformer oil is analyzed, and the method of parameter extraction of sensor in standard oil sample and measurement model of sensor in oil sample to be measured are obtained. Finally, an experimental platform is built to verify the above conclusions. The results show that the quartz tuning fork detection model has good repeatability, the measurement errors of density, viscosity and dielectric constant are 2.52%, 6.53% and 3.36%, respectively, which meet the online monitoring accuracy requirements. The detection technology of transformer viscosity, density and dielectric constant based on quartz tuning fork realizes the simultaneous detection of three parameters in the same method, which meets the requirements of miniaturization, diversification and real-time detection of power parameters under the condition maintenance system, and also provides a new application scenario for tuning fork quartz crystal oscillators.

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“…Nowadays some architectures employ resonance mechanisms for measuring the temperature [1][2][3][4][5][6]. However, most of these structures require analog-digital converters in order to interpret the analog output of the sensor.…”

Section: Introductionmentioning

confidence: 99%

Integrated digital architecture for measuring temperature using a VCO as sensor

Montoya-Suárez

Rodríguez-Ruiz

Saavedra-Gomez

2014

2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)

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The proposed architecture is based on the linear response f 0 vs. T of a Voltage Controlled Oscillator (VCO), which is used as a temperature sensor. The simplicity of the architecture makes digital integration in a CMOS technology 0.5um, 5V, N-Well feasible; this is achieved by using basic combinational and sequential digital circuit to implement the characteristic equation for the temperature depending on the oscillation frequency.

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Finite Element Method Design and Fabrication of Thermo-sensitive Quartz Tuning Fork Resonators as Temperature Sensor

Cited by 3 publications

References 14 publications

Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices

Finite Element Analysis of Electrically Excited Quartz Tuning Fork Devices

New Measurement Method of Viscosity, Density, and Dielectric Constant of Transformer Oil Based on Quartz Tuning Fork

Integrated digital architecture for measuring temperature using a VCO as sensor

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