Finite element analysis of stress evolution in Si based front and back ends micro structures

Senez, V.; Armigliato, A.; Carlotti, G.; Carnevale, G.; Jaouen, H.; Wolff, I.

doi:10.1109/sispad.2002.1034565

International Conferencre on Simulation of Semiconductor Processes and Devices

DOI: 10.1109/sispad.2002.1034565

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Finite element analysis of stress evolution in Si based front and back ends micro structures

V. Senez

A. Armigliato²,

G. Carlotti³

et al.

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Finite element analysis of stress evolution in Si based front and back ends micro structures

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References 9 publications

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