Finite-element analysis of silicon condenser microphones with corrugated diaphragms

Ying, Ming; Zou, Quanbo; Yi, Sung

doi:10.1016/s0168-874x(98)00031-6

Cited by 23 publications

(18 citation statements)

References 8 publications

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“…The intrinsic tensile stress in a corrugated membrane is significantly released by the corrugations in the structure. Several analytical models for designing corrugated diaphragms with residual stress are available [40], [41], [37]. Fuldner et al [42] proposed a new method to derive an analytical model for corrugated diaphragms for silicon microphones.…”

Section: B Stress-tolerant Design By Corrugations In the Diaphragmmentioning

confidence: 99%

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

Miao

Oberhammer

2008

J. Microelectromech. Syst.

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This paper presents a ruthenium metal-contact RF microelectromechanical system switch based on a corrugated silicon oxide/silicon nitride diaphragm. The corrugations are designed to substantially reduce the influence of the fabricationinduced stress in the membrane, resulting in a highly insensitive design to process parameter variations. Furthermore, a novel multilayer metal-contact concept, comprising a 50-nm chromium/ 50-nm ruthenium/500-nm gold/50-nm ruthenium structure, is introduced to improve the contact reliability by having a hard-metal surface of ruthenium without substantial compromise in the contact and transmission-line resistances, which is shown by theoretical analysis of the contact physics and confirmed by measurement results. The contact resistance of the novel metallization stack is investigated for different contact pressures and is compared to pure-gold contacts. The contact reliability is investigated for different dc signal currents. At a measurement current of 1.6 mA, the Ru-Au-Ru contacts have an average lifetime of about 100 million cycles, whereas the Au-Au contacts reach 24 million cycles only. For larger signal currents, the metal contacts have proven to be more robust over the Au-Au contacts by a factor of ten. The measured pull-in voltage is reduced significantly from 61 V for flat diaphragm to 36 V for corrugated diaphragm with the introduction of corrugation. The measured RF isolation with a nominal contact separation of 5 µm is better than −30 dB up to 4 GHz and still −21 dB at 15 GHz, whereas the insertion loss of the fully packaged switch including its transmission line is about −0.7 dB up to 4 GHz and −2.8 dB at 15 GHz.[ 2007-0271]Index Terms-Contact metal, contact resistance, corrugated membrane, RF microelectromechanical system (MEMS) switch, wafer-level packaging.

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Section: B Stress-tolerant Design By Corrugations In the Diaphragmmentioning

confidence: 99%

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

Miao

Oberhammer

2008

J. Microelectromech. Syst.

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“…In one approach the material, including silicon nitride, polysilicon, aluminum, and polyimide (Scheeper et al 1991;Torkkeli et al 2000;Pedersen et al 1997;, and fabrication process of the diaphragm is optimized to increase the sensitivity while in the other, the structure is redesigned to obtain the same goal. The main problem in all mentioned structures (Ying et al 1998;Li et al 2001; Mohamad et al 2008;Kim et al 2006;Yang 2010), is that by an increase in the mechanical sensitivity the pull-in voltage significantly decreased, especially in spring supported diaphragm. In this paper a novel structure for diaphragm is proposed which can increase both mechanical sensitivity and effective area with no negative effect on pull-in voltage.…”

Section: Diaphragm Modelmentioning

confidence: 99%

“…The mentioned vents make the microphones, unlike pressure sensors, response to the varying pressure instead of absolute static pressure (Martin et al 2007). Ying et al (1998), as well as some other designers, , Li et al (2001) and designed a corrugated diaphragm. In comparison to the normal diaphragms, the corrugated diaphragm has larger effective area, after the deflection, as well as higher mechanical sensitivity.…”

mentioning

confidence: 99%

Design and characterization of high sensitive MEMS capacitive microphone with fungous coupled diaphragm structure

Gharaei

Koohsorkhi

2015

Microsyst Technol

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“…A finite element microphone analysis was presented by Ying in 1998 [7]. He modeled the microphone diaphragm by ANSYS software and ignored the fluid-structure coupling, but he considered the diaphragm initial tension.…”

Section: Introductionmentioning

confidence: 99%

Numerical fluid structural interface analysis in condenser microphone design

2011

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Condenser microphones are widely used in electronic and acoustic applications. Although, various mechanical and electro-mechanical methods have been developed to design and analyze these sensors. However, due to the difficulty of fluid-structural-electrical couplings, none of them can introduce a method that consider all parameters of the design together. This research concerns the effects of four main parameters: a) Air gap size; b) Number of holes on the back-plate; c) holes radius size and d) location of the holes in back plate, on the response of the microphones. This analysis have been carried out based on coupled finite element and finite volume method using ANSYS-CFX software to simulate fluid-structure interaction between the diaphragm and air in the air-gap region. By using this method, the effects of the geometric parameters on the response of the microphone have been investigated. Results show that, increasing air gap size, holes radius, and holes number decrease the damping effects of the air between diaphragm and back plate. On the other hand, increasing the distance between the holes has the opposite effect. In addition, results reveal that among these four parameters, increasing the number of holes on back plate is the most efficient method in reducing air-gap damping effects.

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Finite-element analysis of silicon condenser microphones with corrugated diaphragms

Cited by 23 publications

References 8 publications

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

Design and characterization of high sensitive MEMS capacitive microphone with fungous coupled diaphragm structure

Numerical fluid structural interface analysis in condenser microphone design

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