2009
DOI: 10.1143/jjap.48.07gf04
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Finite Element Analysis of Sensitivity of Frequency-Change Force Sensor

Abstract: The characteristics of various frequency-change force sensors were analyzed using the finite-element method and compared. In the case of the sensor design, displacements at both ends of the sensor must be made as small as possible to reduce the influence of fixation, and the resonance frequency of the sensor must be considerably changed by the axial force to realize high sensitivity. The displacements u i (i ¼ x; y; z) were analyzed as the ratio u i =u i0 to the maximum displacement u i0 at the central part of… Show more

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Cited by 17 publications
(17 citation statements)
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(9 reference statements)
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“…The finite element method has been utilized for the analysis on piezoelectric vibratory sensors and actuators. 18,19) The analysis is performed using the finite element analysis program ANSYS ver. 11.…”
Section: Calculated Equivalent Mass Of the Resonatormentioning
confidence: 99%
“…The finite element method has been utilized for the analysis on piezoelectric vibratory sensors and actuators. 18,19) The analysis is performed using the finite element analysis program ANSYS ver. 11.…”
Section: Calculated Equivalent Mass Of the Resonatormentioning
confidence: 99%
“…To develop such a sensor, the authors have studied an acceleration sensor utilizes the phenomenon that the resonance frequency of a bending vibrator changes by the axial force. [1][2][3][4][5][6][7][8][9][10][11][12] A new construction of the acceleration sensor using a cross-coupled vibrator is proposed here, and investigated experimentally. The sensor detects the acceleration from a change of vibration amplitude of the cross coupled vibrator.…”
Section: Introductionmentioning
confidence: 99%
“…Then, the structures of one-and two-axis acceleration sensors were proposed, and investigated experimentally. [1][2][3][4][5][6][7][8] But, the characteristics of the two-axis sensor shoud be improved on the point that an signal from the other axis is detected. 9) As this reason, it is clarified that mass of the sensor rotates by acceleration in the plane.…”
Section: Introductionmentioning
confidence: 99%