Finite-element analysis for simulation of layered SAW devices with XY LiNbO 3 substrate

Ippolito, Samuel J.; Kalantar‐zadeh, Kourosh; Włodarski, W.; Powell, David A.

doi:10.1117/12.469080

Cited by 5 publications

(15 citation statements)

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“…However, the resulting roots of b are either purely real or complex conjugate pairs. Since these roots leads to Rayleigh waves that decay with the depth along x 3 , only the roots with negative imaginary parts are accepted to be consistent with the physical meaning of wave propagation in piezoelectric media (Gardner et al, 2001;Ippolito et al, 2002). There are four such roots for b (denoted as b m for m = 1, 2, 3, 4) and for each such value, there exist a unique Eigenvector α m .…”

Section: Calculations For Lithium Niobate Crystalsmentioning

confidence: 99%

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Surface Acoustic Wave Based Wireless MEMS Actuators for Biomedical Applications

Dissanayake¹,

Al-Sarawi²,

Abbott³

2010

Acoustic Waves

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Section: Calculations For Lithium Niobate Crystalsmentioning

confidence: 99%

“…iii. The acoustic wave is assumed to pass the output IDT once, and interact with no reflections caused by impedance mismatches (Gardner et al, 2001;Ippolito et al, 2002). iv.…”

Section: Electric Potential At Output Idtmentioning

confidence: 99%

Surface Acoustic Wave Based Wireless MEMS Actuators for Biomedical Applications

Dissanayake¹,

Al-Sarawi²,

Abbott³

2010

Acoustic Waves

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“…In order to get an understanding of how a SAW device behave when it is operating as a sensor and/or actuator, SAW devices with different material properties [17][18][19] and different crystal cuts [14][15][16] are designed and animated in ANSYS. Figure 3(a) shows the geometry of a simple SAW device which consists of a piezoelectric substrate and a set of IDTs.…”

Section: Saw Device Simulationmentioning

confidence: 99%

“…The selection of a propagation mode depends on the type of material and the intended application. Different crystal cuts can be used to generate a specific surface acoustic mode [11][12][13][14][15][16].…”

Section: Saw Propagation Modesmentioning

confidence: 99%

A radio frequency controlled microvalve for biomedical applications

et al. 2006

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In this paper we propose the use of a RF controlled microvalve for implementation on a PZT substrate for biomedical applications. Such device has a huge range of applications such as parallel mixing of photo-lithographically defined nanolitre volumes, flow control in pneumatically driven microfluidic systems and lab-on-chip applications. The microvalve makes use of direct actuation mechanisms at the microscale level to allow its use in vivo applications. A number of acoustic propagation modes are investigated and their suitability for biomedical applications, in terms of the required displacement, device size and operation frequency. A theoretical model of the Surface Acoustic Wave (SAW) device is presented and its use in micro-valve application was evaluated using ANSYS tools. Furthermore, the wireless aspect of the device is considered through combining the RF antenna with the microvalve simulation by assuming a high carrier frequency with a small peak-to-peak signal. A new microvalve structure which uses a parallel type piezoelectric bimorph actuator was designed and simulated using ANSYS tools. Then, further optimization of the device was carried out to achieve a better coupling between electrical signal and mechanical actuation within the SAW device.

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“…It is assumed that the crystal cut is best set so that the SAW velocity is directed to the x 1 direction to allow an orthogonal interaction between the SAW and the output IDT. Moreover to simplify the analysis, the acoustic wave is assumed to pass the output IDT once, and interact with no reflections caused by impedance mismatches [8,13]. Since the behavior of the propagating waves and the placement of the IDT being periodic, the analysis is carried out for a single period as shown in Fig.…”

Section: Electric Potential At Output Idtmentioning

confidence: 99%

Electrostatic Microactuator Design Using Surface Acoustic Wave Devices

Dissanayake

Al-Sarawi

Abbott

Smart Sensors and Sensing Technology

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An integration of low power operated Surface Acoustic Wave (SAW) devices with the electrostatic microactuators for microfluidic and similar applications is presented in this chapter. Passive, low power, and small area devices can be interrogated wirelessly using SAW devices, which can respond to a uniquely coded signal for a secure and reliable operation. The novel approach relies on converting the interrogating coded signal to surface acoustic wave that is then correlated with an embedded code. A theoretical analysis of how the actuation mechanism operates is carried out and simulation results of the new microactuator are discussed. At the initial analytical stage, for simplicity, a basic SAW delay line structure is used to generate an electrostatic field between output interdigital transducer (IDT) of the SAW device and a thin conductive plate (actuator), which is placed on top of the output IDT. The static and transient displacement analysis of the actuator is carried out using ANSYS simulation tools. A comparison between the static displacements obtained from ANSYS based simulations and Rayleigh-Ritz based analysis is also presented and discussed.

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Finite-element analysis for simulation of layered SAW devices with XY LiNbO 3 substrate

Cited by 5 publications

References 0 publications

Surface Acoustic Wave Based Wireless MEMS Actuators for Biomedical Applications

Surface Acoustic Wave Based Wireless MEMS Actuators for Biomedical Applications

A radio frequency controlled microvalve for biomedical applications

Electrostatic Microactuator Design Using Surface Acoustic Wave Devices

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