Fine Surface Processing of LiNbO&lt;sub&gt;3&lt;/sub&gt; Single Crystal by Mask-less Etching Using NF&lt;sub&gt;3&lt;/sub&gt; System Gas Plasma RIE

Omata, Teruaki; Murakami, Noritsugu; Yoshikado, Shinzo

doi:10.1541/ieejfms.128.187

IEEJ Trans. FM

2008

DOI: 10.1541/ieejfms.128.187

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Fine Surface Processing of LiNbO<sub>3</sub> Single Crystal by Mask-less Etching Using NF<sub>3</sub> System Gas Plasma RIE

Teruaki Omata

Noritsugu Murakami

Shinzo Yoshikado

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Fine Surface Processing of LiNbO<sub>3</sub> Single Crystal by Mask-less Etching Using NF<sub>3</sub> System Gas Plasma RIE

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References 14 publications

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