Fine-structured patterns of porous alumina material fabricated by a replication method

Fabrication of SiC Ceramics with Micropatterns from a Facile Replication Process

“…From our previous study, PVA remained partially undissolved in water with its content higher than 5 wt%, whereas PVA concentration lower than 2 wt% resulted in low bonding strength among the ceramic particles. 15 On the other hand, increased content of PVA leads to higher viscosity of the slurry, which prevents complete infilling of the slurry into the master channels, and thus obstructs the formation of desired integrated patterns. 23 On this consideration, the concentrations of PVA and ceramic powder were determined as 4 and 10 wt% with 86 wt% of distilled water.…”

“…[9][10][11] Although several microfabrication methods have been developed in the last decades, techniques that can produce ceramic composites with refined patterns are limited. [12][13][14][15] Silicon carbide (SiC)-based composites are noticeable structural materials and have been widely used as abrasive materials, hard tools, and high-temperature structural components. [16][17][18] Thus, SiC composites, if fabricated with refined structures, can find substantial applications in microdevices, nuclear instruments, structural support materials, etc.…”

“…Durable ceramic materials possess excellent thermal stability, high mechanical strength and chemical inertness, even in harsh environments, which are essential for the industrialization of the nano/micro‐structured materials . Although several microfabrication methods have been developed in the last decades, techniques that can produce ceramic composites with refined patterns are limited …”

ZnO Submicrometer Rod Array by Soft Lithographic Micromolding with High Solid Loading Nanoparticle Suspension

“…Soft lithography offers a novel and effective approach to create ceramic patterns with micro‐ to nanostructures . Microelectromechanical systems (MEMS) based on ceramic materials have been successfully achieved by soft lithography .…”

“…For example, complicated borosilicon carbonitride (SiBNC) MEMS devices with 20–100 μm dimensions have been obtained by microtransfer molding; the structural integrity of MEMS Al 2 O 3 ceramics has been further enhanced by centrifugally aided micromolding; parallel SiCN microlines several millimeters in length have been created by micromolding in capillaries with ceramic precursors . Moreover, patterned submicrometer arrays of parallel lines and dots of different ceramic materials (Al 2 O 3 , ZnO, PbTiO 3 , Pb(Zr x Ti 1−x )O 3 , and Ba x Sr 1−x TiO 3 ) have been prepared by micromolding ceramic precursor solutions or sol–gels followed by annealing. The width of the ceramic features ranges from 100 to 600 nm, and the height from 25 to 200 nm.…”