2006
DOI: 10.1109/jlt.2006.874585
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Filter-embedded four-channel WDM module fabricated from fluorinated polyimide

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Cited by 8 publications
(3 citation statements)
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“…The required metasurfaces embedded in polymer with the same refractive index to the waveguide cladding can be fabricated in a similar way. The metasurface-TFEs can be inserted into a well-adapted waveguide slot following the similar technique which is used to integrate classic TFEs into the polymer-based PICs [22,27,28]. The waveguide slot is formed by photolithography and reactive ion etching with precise width and depth to hold the metasurfaces in place.…”
Section: Discussion On Fabrication Feasibilitymentioning
confidence: 99%
See 1 more Smart Citation
“…The required metasurfaces embedded in polymer with the same refractive index to the waveguide cladding can be fabricated in a similar way. The metasurface-TFEs can be inserted into a well-adapted waveguide slot following the similar technique which is used to integrate classic TFEs into the polymer-based PICs [22,27,28]. The waveguide slot is formed by photolithography and reactive ion etching with precise width and depth to hold the metasurfaces in place.…”
Section: Discussion On Fabrication Feasibilitymentioning
confidence: 99%
“…The polymer waveguides are etched to contain a free-propagating space within the photonic chips. The metasurfaces are vertically inserted into this slot using the available technology for inserting the TFEs, and then fixed using ultraviolet (UV) curable optical adhesive [27,28]. Compared to the classic TFEs and other micro-optic elements, the metasurfaces can manipulate light within a short distance, such as the beam collimation depicted in figure 1(b).…”
Section: Conceptmentioning
confidence: 99%
“…There are different types of WDM filters, namely Fibre Bragg Gratings [10]; arrayed-waveguide gratings AWG [11,12]; directional couplers [13], Mach-Zehnder interferometers (MZI) [14], and thin-film filters (TFF) [15]. Thin film filters offer distinct advantages over their different counterparts.…”
Section: Thin-film Filters Inserted In Optical Polymer Waveguidesmentioning
confidence: 99%