Film Deposition by Energetic Condensation

Anders, André

doi:10.1007/978-0-387-79108-1_8

Cited by 97 publications

(210 citation statements)

References 125 publications

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“…This is consistent with observations based on ion charge state spectrometry [31]. Those fluctuations rooted in the fractal nature of the cathode processes [4].…”

Section: Q =supporting

confidence: 92%

Supersonic metal plasma impact on a surface: an optical investigation of the pre-surface region

Ni¹,

Anders²

2010

J. Phys. D: Appl. Phys.

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TitleSupersonic metal plasma impact on a surface: An optical investigation of the pre-surface region DISCLAIMERThis document was prepared as an account of work sponsored in part by the United States Government. While this document is believed to contain correct information, neither the United States Government nor any agency thereof, nor The Regents of the University of California, nor any of their employees, makes any warranty, express or implied, or assumes any legal responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by its trade name, trademark, manufacturer, or otherwise, does not necessarily constitute or imply its endorsement, AbstractAluminum plasma, produced in high vacuum by a pulsed, filtered cathodic arc plasma source, was directed onto a wall where if formed a coating. The accompanying "optical flare" known from the literature was visually observed, photographed, and spectroscopically investigated with appropriately high temporal (1 µs) and spatial (100 µm) resolution. Consistent with other observations using different techniques, it was found that the impact of the fully ionized plasma produces metal neutrals as well as desorbed gases, both of which interact with the incoming plasma. Most effectively are charge exchange collisions between doubly charged aluminum and neutral aluminum, which lead to a reduction of the flow of doubly charged before they reach the wall, and a reduction of neutrals as the move away from the surface. Those plasma-wall interactions are relevant for coating processes as well as for interpreting the plasma properties such as ion charge state distributions.

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“…This is consistent with observations based on ion charge state spectrometry [31]. Those fluctuations rooted in the fractal nature of the cathode processes [4].…”

Section: Q =supporting

confidence: 92%

Supersonic metal plasma impact on a surface: an optical investigation of the pre-surface region

Ni¹,

Anders²

2010

J. Phys. D: Appl. Phys.

Self Cite

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“…Like DCVAE systems, the arc current supplied to the evaporator can be constant (DC), pulsed, or a combination of DC and pulsed. There are several reviews and books about FCVAE describing the scientific and technical solutions [79,80,[106][107][108][109][110][111][112]. However none of these are directed toward the deposition of DLC coatings.…”

Section: Filtered Cathodic Vacuum Arc Evaporation: Fcvaementioning

confidence: 98%

“…In case of the filtered HCA it was reported that the kinetic energy is about 25 eV at the duct end, whereas up to 45 eV was measured for the unfiltered HCA [84]. It should be noted that the ion energy also depends on the magnitude and direction of the magnetic field applied for steering the arc and guiding the plasma [80].…”

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confidence: 91%

See 2 more Smart Citations

60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications

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Laser Cladding of Layered Ti/Nb/Cu Cathode with Homogeneous Arc Ablation Behaviors

Guan

Gao

et al. 2023

Adv Eng Mater

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Arc ablation threatens the cathode operating time and restricts the development of high‐power arc heaters. Surface modification is an effective strategy in improving cathode ablation resistance without reducing matrix conductivities. Herein, Nb layer and Ti layer are laser clad on Cu matrix to decrease the arc ablation of Cu cathode. The total thickness of laser‐clad Nb/Ti layer reaches 1850 μm. The Nb layer restrains Cu from diluting into surface cladding and no detrimental Ti–Cu intermetallic is formed. The surface Ti content is as high as 98.34 at%, guaranteeing the arc discharge homogeneity. The arc ablation behaviors of Ti/Nb/Cu cathodes are investigated in air atmosphere. The layered cathode discharges and ablates homogeneously. The arc discharge center is shallow with no appearance of deep pits or craters. The maximum ablation depth (72.1 μm) after 30 s discharging is ≈33.4% lower than that of Cu cathode. Besides, the cathode ablation rate, 1.61 μg C−1, is ≈27.5% lower than Cu cathode. The improved arc ablation resistance is interpreted in the protective effect of refractory TiO2 layer formed during air arc discharging.

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Film Deposition by Energetic Condensation

Cited by 97 publications

References 125 publications

Supersonic metal plasma impact on a surface: an optical investigation of the pre-surface region

Supersonic metal plasma impact on a surface: an optical investigation of the pre-surface region

60 years of DLC coatings: Historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications

Laser Cladding of Layered Ti/Nb/Cu Cathode with Homogeneous Arc Ablation Behaviors

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