Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

Kanaoka, Matao; Liu, C.; Nomura, Kazushi; Ando, Miwako; Takino, Hideo; Fukuda, Yasunari; Mimura, Hidekazu; Yamauchi, Kazuto; Mori, Yojiro

doi:10.1116/1.2789440

Cited by 35 publications

(14 citation statements)

References 7 publications

(1 reference statement)

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“…In the field of precision machining, the degree of accuracy has been increased to atomic order. Various types of mirror or lens having a peak-to-valley (p-v) accuracy of 1 nm can now be fabricated, which are applied to the advanced optical apparatus used in X-ray microscopy and extreme ultraviolet lithography (EUVL) [1]. Ion beam figuring [2], magnetorheological finishing [3], and elastic emission machining (EEM) [4] are employed to process surfaces with atomic-order controllability.…”

Section: Introductionmentioning

confidence: 99%

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Effect of focusing flow on stationary spot machining properties in elastic emission machining

Takei

Mimura

2013

Nanoscale Res Lett

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Ultraprecise optical elements are applied in advanced optical apparatus. Elastic emission machining (EEM) is one of the ultraprecision machining methods used to fabricate shapes with 0.1-nm accuracy. In this study, we proposed and experimentally tested the control of the shape of a stationary spot profile by introducing a focusing-flow state between the nozzle outlet and the workpiece surface in EEM. The simulation results indicate that the focusing-flow nozzle sharpens the distribution of the velocity on the workpiece surface. The results of machining experiments verified those of the simulation. The obtained stationary spot conditions will be useful for surface processing with a high spatial resolution.

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Section: Introductionmentioning

confidence: 99%

“…The EEM surfaces were observed by scanning tunneling microscopy and confirmed to have atomic flatness [6]. As a result, EEM has been widely applied to the fabrication of ultraprecise mirrors used in synchrotron radiation facilities and EUVL [1]. …”

Section: Introductionmentioning

confidence: 99%

Effect of focusing flow on stationary spot machining properties in elastic emission machining

Takei

Mimura

2013

Nanoscale Res Lett

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“…To solve these damage problems, some non-contact abrasive based machining methods have been developed, such as float polishing and EEM (Elastic Emission Machining). Using float polishing for zerodur material, surface with roughness less than 2nm RMS can be obtained [4][5] , while using EEM, it is possible to obtain a surfaces with roughness less than 0.2nm Ra [6][7][8] . However, both of them have extremely low efficiency.…”

Section: Introductionmentioning

confidence: 99%

Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processing

2010

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Zerodur material is considered as the ideal material in the high performance optic systems because of its excellent thermal stability characteristics. This paper deals with the impacting factors on the zerodur material surface roughness during atmospheric pressure plasma jet(APPJ) processing. At first, based on multiphase and multi-component in zerodur material, the effect on the zerodur surface chemical components and surface roughness is studied when the element contained Si is etched during the chemical machining process. The change of surface microcosmic topography is observed, it is proved that the technology of atmospheric pressure plasma jet can modify the surface roughness of zerodur material. Moreover, in consideration of the re-deposition phenomenon in the machining process, the composition of the re-deposition are studied and the genesis of the re-deposition were analysed. Scanning Electron Microscopy (SEM) with Energy Dispersive X-ray spectrometry (EDX) were utilized to obtain the elemental composition of the sample powder residuum on zerodur surface. The relationship between substrate roughness and the process parameters is established based on the experimental results. Experimental results indicate that it is beneficial to add certain amount O 2 to modify the surface roughness of zerodur material. This finding provides an important basis for the improvement of surface roughness in APPJ of zerodur material.

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“…As a result, we consider that EEM has sufficient figuring and smoothing capability for the fabrication of EUV optics. [2,3] In this study, we investigated the processing efficiency of EEM for a low-thermal-expansion material from the viewpoint of the removal rate. Zerodur flat surface was processed under various conditions of load and working head rotation speed, and the removal rate was measured.…”

Section: Introductionmentioning

confidence: 99%

Processing efficiency of elastic emission machining for low‐thermal‐expansion material

Kanaoka

Liu²,

Nomura³

et al. 2008

Surface & Interface Analysis

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Extreme ultraviolet (EUV) lithography is currently being developed as a next-generation lithography system. In this system, light at a wavelength of 13.4 nm is used, allowing the patterning of lines with dimensions of less than 40 nm. To focus the light, high-precision optical mirrors are required with a surface roughness of 0.1 nm. In addition, mirror substrates must be low-thermal-expansion materials because EUV light is easily absorbed in matter, accordingly converted to heat. ULE (Corning Inc.) and Zerodur (SCHOTT AG) are well-known examples of such materials. To achieve these requirements for EUV lithography, a high-performance machining method is needed. In previous studies, the machining performance of elastic emission machining (EEM) for the above materials was examined from the viewpoint of roughness improvement. As a result, we considered that EEM has sufficient figuring and smoothing capability for the fabrication of EUV optics. We next evaluate the processing efficiency of EEM. In this study, the processing efficiency of EEM for a low-thermal-expansion material was examined from the viewpoint of the removal rate. As a result of this investigation, the conditions under which the efficiency of EEM is increased were clarified. We analyzed and discussed these conditions.

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Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics

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Cited by 35 publications

References 7 publications

Effect of focusing flow on stationary spot machining properties in elastic emission machining

Effect of focusing flow on stationary spot machining properties in elastic emission machining

Effect on surface roughness of zerodur material in atmospheric pressure plasma jet processing

Processing efficiency of elastic emission machining for low‐thermal‐expansion material

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