AlN-on-sapphire is a promising integrated photonic platform
for
operation over a wide wavelength range from ultraviolet to infrared.
However, this platform suffers from a weak second-order electro-optic
effect, also known as the Pockels effect. Here, we demonstrate an
enhanced Pockels effect by utilizing AlGaN/AlN multiple quantum wells
(MQWs) regrown on the AlN layer. This enhancement is attributed to
the large built-in polarization field in the MQWs, which results in
a higher second-order susceptibility in the MQW layer due to the electric-field-induced
second-order effect overlapping with the optical mode of the waveguiding
device. To investigate this enhancement, we design and fabricate separate
AlN microring resonator modulators (MRMs) with MQWs operating at two
different wavelengths, 1550 and 780 nm. The resonance shift due to
the Pockels effect is characterized by applied voltages and compared
with the AlN MRM of similar dimensions but without MQWs. We observe
enhanced resonance shift factors of 2.16 (at 1550 nm) and 1.56 (at
780 nm) for resonators with MQWs compared to those without MQWs. Through
a modal overlap analysis between the MQW layers and the optical mode
of the resonator, we extract the second-order susceptibility in the
MQW regions, which is shown to be 20 (at 1550 nm) and 10 times (at
780 nm) higher compared to that of AlN. Our study paves a promising
path for realizing III-nitride-integrated photonic modulators with
a stronger Pockels effect by employing MQWs with an optimal overlap
with the optical mode of the modulator.