Field-Induced Nanometer- to Atomic-Scale Manipulation of Silicon Surfaces with the STM

Lyo, In‐Whan; Avouris, Phaedon

doi:10.1126/science.253.5016.173

Cited by 587 publications

(234 citation statements)

References 18 publications

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“…The discovery of probe-based oxidation 41 was shadowed by the more exciting experiments reporting either modifications 62 or manipulations 63 of surfaces with atomicscale capabilities 64 . However, the generality and robustness of the underlying chemical process (anodic oxidation) has transformed Dagata's observation into a reliable a versatile nanolithography approach for patterning and device fabrication 42 .…”

Section: Oxidation Splmentioning

confidence: 99%

Advanced scanning probe lithography

2014

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The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented their exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on the methods and processes that offer genuinely lithography capabilities such as those based on thermal effects, chemical reactions and voltage-induced processes. Published in:Nature Nanotechnology 9, 577-587 (2014) Progress in nanotechnology depends on the capability to fabricate, position, and interconnect nanometre-scale structures. A variety of materials and systems such as nanoparticles, nanowires, two-dimensional materials like graphene and transition metal dichalcogenides, plasmonics materials, conjugated polymers and organic semiconductors are finding applications in nanoelectronics, nanophotonics, organic electronics and biomedical applications. The success of many of the above applications relies on the existence of suitable nanolithography approaches. However, patterning materials with nanoscale features aimed at improving integration and device performance poses several challenges. The limitations of conventional lithography techniques related to resolution, operational costs and lack of flexibility to pattern organic and novel materials have motivated the development of unconventional fabrication methods [1][2][3] .Since the first patterning experiments performed with a scanning probe microscope in the late 80s, scanning probe lithography (SPL) has emerged as an alternative lithography for academic research that combines nanoscale feature-size, relatively low technological requirements and the ability to handle soft matter from small organic molecules to proteins and polymers. Scanning probe lithography experiments have provided striking examples of its capabilities such as the ability to pattern 3D structures with nanoscale features 4 , the fabrication of the smallest field-effect transistor 5 or the patterning of proteins with 10 nm feature size 6 . Figure 1a shows a general scheme of SPL operation. There is a variety of approaches to modify a material in a probe-surface interface which have generated several SPL methods. Scanning probe lithographies can be either classified by emphasizing the distinction between the general nature of the process, chemical versus physical, or by considering if SPL implies the removal or addition of material. However, we consider it is more inclusive and systematic to classify the different SPL methods in terms of the driving mechanisms used in the patterning process, namely thermal, electrical, mechanical and diffusive methods (Fig. 1b). Challenges in nanoscale lithographyThe workhorse of large volume CMOS fabrication, o...

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Section: Oxidation Splmentioning

confidence: 99%

Advanced scanning probe lithography

2014

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“…Recently, the scanning probe technique has emerged as a promising tool to manipulate atoms on semiconductor surfaces [1][2][3][4]. It was indeed demonstrated that H atoms on the H-covered Si(001) surfaces are removed along a Si dimer row in a controlled way [2 -4], exposing a dangling bond (DB) array on the surfaces.…”

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Magnetic Ordering of Dangling Bond Networks on Hydrogen-Deposited Si(111) Surfaces

2003

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Based on total-energy electronic-structure calculations within the density-functional theory, we find that a high spin state is realized for an ultimate dangling bond unit on an otherwise hydrogen-covered Si(111) surface. We further propose a systematic method of constructing nanometer-scale dangling bond networks that exhibit the ferrimagnetic spin ordering. The interplay between the electron-electron interaction and the surface reconstruction is elucidated.

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“…Individual large molecules can be positioned on surfaces 2±4 , and atoms can be transferred controllably between the sample and probe tip 5,6 . The most complex structures 7±11 are produced at cryogenic temperatures by sliding atoms across a surface to chosen sites.…”

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confidence: 99%

Manipulation of atoms across a surface at room temperature

Fishlock

Oral

Egdell

et al. 2000

Nature

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Since the realization that the tips of scanning probe microscopes can interact with atoms at surfaces, there has been much interest in the possibility of building or modifying nanostructures or molecules directly from single atoms. Individual large molecules can be positioned on surfaces, and atoms can be transferred controllably between the sample and probe tip. The most complex structures are produced at cryogenic temperatures by sliding atoms across a surface to chosen sites. But there are problems in manipulating atoms laterally at higher temperatures - atoms that are sufficiently well bound to a surface to be stable at higher temperatures require a stronger tip interaction to be moved. This situation differs significantly from the idealized weakly interacting tips of scanning tunnelling or atomic force microscopes. Here we demonstrate that precise positioning of atoms on a copper surface is possible at room temperature. The triggering mechanism for the atomic motion unexpectedly depends on the tunnelling current density, rather than the electric field or proximity of tip and surface

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Field-Induced Nanometer- to Atomic-Scale Manipulation of Silicon Surfaces with the STM

Cited by 587 publications

References 18 publications

Advanced scanning probe lithography

Advanced scanning probe lithography

Magnetic Ordering of Dangling Bond Networks on Hydrogen-Deposited Si(111) Surfaces

Manipulation of atoms across a surface at room temperature

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