Field Concentrator Based Resonant Magnetic Sensor

Brugger, S.; Simon, P.; Oliver, Paul

doi:10.1109/icsens.2007.355797

Cited by 9 publications

(10 citation statements)

References 5 publications

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“…This is due to the magnetic fringe field emerging from the concentrator sections near the gap. Nevertheless, in view of Maxwell's equation ·M = 0, the magnetic flux density component B ⊥ perpendicular to the sidewalls of the gap is continuous [9]. Thus for sufficiently narrow gaps, i.e., when the concentrator tends towards the gap-free geometry, B gap and the magnetic flux density B in inside the gap-free concentrator can be considered to be equal.…”

Section: Cuboid-shaped Magnetic Field Concentratorsmentioning

confidence: 98%

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Magnetic field amplification by slender cuboid-shaped magnetic concentrators with a single gap

Brugger

Oliver

2010

Sensors and Actuators A: Physical

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Section: Cuboid-shaped Magnetic Field Concentratorsmentioning

confidence: 98%

“…Recently, a cuboid-shaped planar magnetic concentrator with two narrow gaps and a micromechanical resonator were integrated into a highly sensitive resonant magnetic microsensor with frequency output [8,9].…”

Section: Introductionmentioning

confidence: 99%

Magnetic field amplification by slender cuboid-shaped magnetic concentrators with a single gap

Brugger

Oliver

2010

Sensors and Actuators A: Physical

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“…Furthermore, compared to magnetic moment based resonant magnetic sensors, no permanent magnet is required. Simulation and test of a macroscopic proof-of-concept structure resulted in a high sensitivity of 140 kHz/T at a magnetic flux density of 1.5 mT [4]. The fabrication of geometrically optimized planar magnetic field concentrators with two gaps is a major requirement for the miniaturization of the sensor principle.…”

Section: Introductionmentioning

confidence: 99%

“…Most resonant magnetic sensors use the Lorentz force [1][2] or the magnetic moment of a permanent magnet [3] to generate a shift of the resonance frequency in the presence of a magnetic field. Previously, a resonant magnetic sensor combining a magnetic field concentrator with two gaps and a mechanical resonator have been presented [4]. The magnetic concentrator made of soft magnetic material is cut into three parts separated by narrow gaps.…”

Section: Introductionmentioning

confidence: 99%

Geometric Optimization and Microstructuring of Magnetic Concentrators for a Resonant Magnetic Sensor

Brugger

Oliver

2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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This paper reports the design and analysis of a planar magnetic field concentrator with two gaps used for a resonant magnetic sensor and technology steps towards its realization. The device is based on a previously published resonant magnetic sensor combining a magnetic field concentrator and a mechanical resonator. A physical model is reported to explain the magnetic forces acting between the moveable inner part and the two fixed outer parts of the concentrator and the resulting magnetic field dependence of the resonance frequency. To optimize the concentrator and obtain highest sensitivity for the resonant sensor, three-dimensional magnetic finite element simulations using COMSOL MULTIPHYSICS ™ were performed. For the fabrication of planar concentrators made of amorphous soft magnetic material, ion beam etching (IBE), aqua regia wet etching and laser cutting were tested and evaluated.

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“…Another approach reports a resonant magnetic microsensor sensitive enough to measure the earth magnetic field for compass applications [8,9,10]. The sensor combines an electrostatically driven micromechanical resonator and a planar magnetic concentrator with two narrow gaps [8,9,10].…”

Section: Introductionmentioning

confidence: 99%

Detecting the magnetic field direction by a cantilever operating in different vibration modes

2009

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This paper presents a new method of measuring magnetic direction by a cantilever driven in different modes. The magnetic field is detected by measuring the vibration amplitude of the mechanical structure. The vibration mode is activated by an AC current which is driven into the coil on the cantilever. When the structure works at the 1st or 2nd resonant frequency, it will resonant at the modes of the rotation about an axis or the out-of-plane vibration. The structure has been designed, fabricated and tested. The experimental results are compared with the finite element analysis. The displacements of the structure, which differ with the different modes, are shown to be a sine and cosine function of the angle of the magnetic field, respectively. The experiment agrees well with the predicted. The structure can be used to measure the magnetic field direction easily while it is integrated with the function of measuring the vibration amplitudes of the cantilever, exhibiting a resolution of 10 degrees.

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Field Concentrator Based Resonant Magnetic Sensor

Cited by 9 publications

References 5 publications

Magnetic field amplification by slender cuboid-shaped magnetic concentrators with a single gap

Magnetic field amplification by slender cuboid-shaped magnetic concentrators with a single gap

Geometric Optimization and Microstructuring of Magnetic Concentrators for a Resonant Magnetic Sensor

Detecting the magnetic field direction by a cantilever operating in different vibration modes

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