2007 IEEE International Conference on Control and Automation 2007
DOI: 10.1109/icca.2007.4376467
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Fibre-optic Chemical Sensor Based on Characteristic Spectrum Recognition and its Application

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Cited by 2 publications
(1 citation statement)
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“…Such micro-machine structures offer many potential advantages for sensing applications including low power consumption, low fabrication cost, high quality, and reliability. The MEMS chemical sensor not only detect the presence of chemical analytes , but also produce electrical responses proportional to the concentration of the target analyte [1][2].And the structure of chemical sensor support has great influence on the performance of the sensor. Therefore, this paper will take a kind of MEMS chemical sensor support as an example to analyze its mechanical characteristics.…”
mentioning
confidence: 99%
“…Such micro-machine structures offer many potential advantages for sensing applications including low power consumption, low fabrication cost, high quality, and reliability. The MEMS chemical sensor not only detect the presence of chemical analytes , but also produce electrical responses proportional to the concentration of the target analyte [1][2].And the structure of chemical sensor support has great influence on the performance of the sensor. Therefore, this paper will take a kind of MEMS chemical sensor support as an example to analyze its mechanical characteristics.…”
mentioning
confidence: 99%