Fiber-Optic Fabry–Pérot Acoustic Sensor With Multilayer Graphene Diaphragm

Ma, Jun; Xuan, Haifeng; Ho, S. L.; Jin, Wei; Yang, Yuanhong; Fan, Shangchun

doi:10.1109/lpt.2013.2256343

Cited by 237 publications

(118 citation statements)

References 12 publications

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“…While the thickness is comparable to the graphite-based diaphragms previously reported [6], the diameter is an order of magnitude larger. The acoustic pressure test shows that such a sensor based on a large area silver diaphragm has a sensitivity of up to 160 nm∕Pa at 4 kHz frequency.…”

supporting

confidence: 60%

“…The slope of this curve indicates that the dynamic response of the silver diaphragm has a sensitivity of 160 nm∕Pa at 4 kHz. This sensitivity is approximately two orders of magnitude higher than that reported using graphite diaphragm [6]. This sensitivity improvement is primarily attributed to the significantly increased diameter of the diaphragm.…”

mentioning

confidence: 60%

“…The FP pressure sensors based on different diaphragms have been investigated intensively in recent years, and the sensitivity has been improved steadily. Recently, Ma et al demonstrated a Fabry-Perot interferometer (FPI) acoustic sensor based on a multilayer graphene diaphragm with thickness of approximately 100 nm, and dynamic pressure sensitivity of 1100 nm∕kPa was achieved with the diaphragm diameter of 125 μm [6]. Although the pressure sensitivity of the sensor based on the graphene diaphragm can potentially be very high thanks to small thickness, it is usually difficult to prepare and process single-or few-layered graphene diaphragms with large diameters and transfer them onto the sensor head.…”

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confidence: 99%

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Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm

et al. 2014

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A fiber-optic acoustic pressure sensor based on a large-area nanolayer silver diaphragm is demonstrated with a high dynamic pressure sensitivity of 160 nm∕Pa at 4 kHz frequency. The sensor exhibits a noise limited detectable pressure level of 14.5 μPa∕Hz 1∕2 . Its high dynamic pressure sensitivity and simple fabrication process make it an attractive tool for acoustic sensing and photo-acoustic spectroscopy. . Although the pressure sensitivity of the sensor based on the graphene diaphragm can potentially be very high thanks to small thickness, it is usually difficult to prepare and process single-or few-layered graphene diaphragms with large diameters and transfer them onto the sensor head. In addition, optical reflectivity of the graphene layer is relatively small compared to metal films. In this Letter, we demonstrate an acoustic sensor based on a large area silver diaphragm 150 nm in thickness and 2.4 mm in diameter. While the thickness is comparable to the graphite-based diaphragms previously reported [6], the diameter is an order of magnitude larger. The acoustic pressure test shows that such a sensor based on a large area silver diaphragm has a sensitivity of up to 160 nm∕Pa at 4 kHz frequency. To our best knowledge, this is the highest acoustic pressure sensitivity ever reported for fiber-optic acoustic sensors based on diaphragms. The sensor is able to detect acoustic pressure as weak as 14.5 μPa∕Hz 1∕2 . The acoustic pressure sensing head based on the silver diaphragm comprises a standard polarization maintaining fiber (PM fiber), a ceramic split sleeve, and the silver diaphragm, as shown in Fig. 1(a). Figure 1(b) is the image of the proposed sensing head. A picture of the ceramic split sleeve, on which the diaphragm is attached, is also shown in the bottom inset of Fig. 1(b), and the inner diameter of this split sleeve is 2.4 mm. The PM fiber end facet was polished with an angle of 8°to reduce the Fresnel reflection from the fiber end surface. The fabrication process of the sensing head is similar to that reported in our previous paper [5]. The distance between the fiber end and the diaphragm is approximately 150 μm adjusted by a high precision linear stage (Newport ILS-250CC) with a displacement resolution of 0.5 μm.The silver thin film used in this sensor is approximately 150 nm thick with >2.4 mm diameter that covers one end of the split sleeve. The top inset of Fig. 1(b) is an SEM image of the silver diaphragm. This sensing diaphragm has several advantages, including good stability and high reflectivity over the near infrared wavelength range. In general, the pressure sensitivity depends both on the material and the thickness of the diaphragm. In fact, the pressure sensitivity of an acoustic sensor based on an edge-clamped circular diaphragm is proportional to R 4 ∕t 3 , where R is the radius and t is the thickness of the diaphragm [7]. Therefore a diaphragm with large

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confidence: 60%

mentioning

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Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm

et al. 2014

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“…A technique for nondestructive wafer scale diagnosis of optically conducting surfaces is hence enabled. This technique has a remarkable potential for instance when considering multilayer graphene sheets, whose thickness determination is necessary for applications in optics [17][18][19][20] and electronics. [21][22][23] Currently, several methods are used for estimating the multilayer graphene thickness.…”

mentioning

confidence: 99%

Coherent absorption of light by graphene and other optically conducting surfaces in realistic on-substrate configurations

Zanotto¹,

Bianco²,

Mišeikis³

et al. 2016

APL Photonics

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Analytical formulas are derived describing the coherent absorption of light from a realistic multilayer structure composed by an optically conducting surface on a supporting substrate. The model predicts two fundamental results. First, the absorption regime named coherent perfect transparency theoretically can always be reached. Second, the optical conductance of the surface can be extrapolated from absorption experimental data even when the substrate thickness is unknown. The theoretical predictions are experimentally verified by analyzing a multilayer graphene structure grown on a silicon carbide substrate. The graphene thickness estimated through the coherent absorption technique resulted in good agreement with the values obtained by two other spectroscopic techniques. Thanks to the high spatial resolution that can be reached and high sensitivity to the probed structure thickness, coherent absorption spectroscopy represents an accurate and non-destructive diagnostic method for the spatial mapping of the optical properties of two-dimensional materials and of metasurfaces on a wafer scale.

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“…There are many demonstrations of extrinsic FPIs for pressure and acoustic sensing using optical fibers [20][21][22][23][24][25][26]. A summary of these works reported up to 2011 can be found in [27].…”

Section: Fabry-pérot Configurationmentioning

confidence: 99%

Advanced fiber-optic acoustic sensors

et al. 2014

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Acoustic sensing is nowadays a very demanding field which plays an important role in modern society, with applications spanning from structural health monitoring to medical imaging. Fiber-optics can bring many advantages to this field, and fiber-optic acoustic sensors show already performance levels capable of competing with the standard sensors based on piezoelectric transducers. This review presents the recent advances in the field of fiber-optic dynamic strain sensing, particularly for acoustic detection. Three dominant technologies are identified -fiber Bragg gratings, interferometric Mach-Zehnder, and Fabry-Pérot configurations -and their recent developments are summarized.

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Fiber-Optic Fabry–Pérot Acoustic Sensor With Multilayer Graphene Diaphragm

Cited by 237 publications

References 12 publications

Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm

Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm

Coherent absorption of light by graphene and other optically conducting surfaces in realistic on-substrate configurations

Advanced fiber-optic acoustic sensors

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