2019
DOI: 10.1155/2019/8680715
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FIB-SEM Three-Dimensional Tomography for Characterization of Carbon-Based Materials

Abstract: A review on the recent advances of the three-dimensional (3D) characterization of carbon-based materials was conducted by focused ion beam-scanning electron microscope (FIB-SEM) tomography. Current studies and further potential applications of the FIB-SEM 3D tomography technique for carbon-based materials were discussed. The goal of this paper is to highlight the advances of FIB-SEM 3D reconstruction to reveal the high and accurate resolution of internal structures of carbon-based materials and provide suggest… Show more

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Cited by 31 publications
(20 citation statements)
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References 63 publications
(82 reference statements)
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“…FIB-SEM is a micromilling and analysis system that can produce 3D images of a tissue sample for characterising nanostructures and organisation [56]. FIB-SEM allows for serial milling, sectioning and imaging simultaneously [57]. The benefits of using a dual-beamed FIB-SEM system include the milling and preparation of tissue samples which are particularly fragile or porous [58].…”
Section: Fib-semmentioning
confidence: 99%
“…FIB-SEM is a micromilling and analysis system that can produce 3D images of a tissue sample for characterising nanostructures and organisation [56]. FIB-SEM allows for serial milling, sectioning and imaging simultaneously [57]. The benefits of using a dual-beamed FIB-SEM system include the milling and preparation of tissue samples which are particularly fragile or porous [58].…”
Section: Fib-semmentioning
confidence: 99%
“…In the dual beam system, the Ga + beam can be used for serial milling of the sample, and at the same time, a sequence of SEM cross-sectional images can be obtained. Then, segmentation and 3D visualization of the sample can be rendered using commercial software (e.g., Avizo) [78]. Such 3D tomographic analysis bridges the gap between X-ray and transmission electron microscopic tomography techniques.…”
Section: Fib and Synchrotron Techniques Synchrotron-basedmentioning
confidence: 99%
“…X-ray computed tomography (X-ray CT) can provide a fairly rapid, nondestructive solution for acquiring the 3D image of the sample, if feature sizes of down to ~ 1 μm are of interest, dosing is not an issue, and the X-ray absorption level of each region of the sample is sufficient for a follow-up analysis 3 . On the other hand, for resolutions down to sub-10 nm, one can use a repetitive delayering/imaging strategy, where a scanning electron microscope (SEM) or helium ion microscope (HIM) are used for imaging the layers of the sample, and methods such as focused ion beam (FIB) and knife technology (more suitable for biological applications) are used for removing thin layers of the sample to expose the buried layer for imaging 4 , 5 . These 2D images are then stacked to obtain a 3D tomographic image.…”
Section: Introductionmentioning
confidence: 99%