Introduction to Focused Ion Beams 2005
DOI: 10.1007/0-387-23313-x_10
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FIB Lift-Out Specimen Preparation Techniques

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Cited by 129 publications
(134 citation statements)
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“…The number density and the average size of secondary precipitates were measured from the obtained micrographs using a grey scale segmentation method. Thin-foil specimens were prepared using a FIB-based lift-out technique [34] [35,36]. The chemical composition of precipitates was also analysed using Energy Dispersive X-ray spectroscopy (EDX) with an Oxford Instruments X-Max 80 N TLE EDX system in the same TEM system at an accelerating voltage of 200 kV.…”
Section: Materials and Experimental Methodsmentioning
confidence: 99%
“…The number density and the average size of secondary precipitates were measured from the obtained micrographs using a grey scale segmentation method. Thin-foil specimens were prepared using a FIB-based lift-out technique [34] [35,36]. The chemical composition of precipitates was also analysed using Energy Dispersive X-ray spectroscopy (EDX) with an Oxford Instruments X-Max 80 N TLE EDX system in the same TEM system at an accelerating voltage of 200 kV.…”
Section: Materials and Experimental Methodsmentioning
confidence: 99%
“…93 EXLO is also appropriate where manipulation of an electron transparent specimen to an S/TEM microelectromechanical system carrier device is required (as shown in Figure 7b ), since this avoids the FIB imaging and potential ion implantation damage that can occur to the specimen during INLO. Recent advances in EXLO include a new grid design and method that negates the need for a carbon fi lm and allows for further FIB milling or other processing after lift-out.…”
Section: Recent Advances In S/tem Specimen Preparationmentioning
confidence: 99%
“…After, the foil is deposited with a micromanipulator in an adequate substrate and is ready for analysis [39]. This procedure is known as FIB/lift-out preparation, and is often found related with SEM and TEM ex-situ analysis [40]. On the other hand, the FIB technique can be also used for site-specific in-situ analyses.…”
Section: Focused Ion Beammentioning
confidence: 99%