FIB carving of nanopores into suspended graphene films

Morin, Amy; Lucot, D.; Ouerghi, Abdelkarim; Patriarche, G.; Bourhis, E. Le; Madouri, Ali; Ulysse, C.; Pelta, Juan; Auvray, L.; Jede, R.; Bruchhaus, L.; Giérak, J.

doi:10.1016/j.mee.2012.02.029

Cited by 38 publications

(26 citation statements)

References 14 publications

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“…Nevertheless, efforts to continue to develop nanopores using other thin-film materials such as molybdenum disulfide, but with graphene seemingly foremost among them, continue; approaches often see the use of an underlying thin-film SiN x support. [242][243][244][245][246][247][248] While lacking the electronic properties of graphene, carbon nanomembranes (see discussion above) present an appealing potential ultrathin carbonbased alternative. 249 Nanopores, fabricated using a suitable selection of means and materials of construction, and employed in a variety of configurations and approaches, are an exciting and promising motif for single molecule sensing, confinement, and manipulation.…”

Section: Nanofluidic Sample Cellsmentioning

confidence: 99%

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Dwyer

Harb

2017

Appl Spectrosc

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We present a review of the use of selected nanofabricated thin films to deliver a host of capabilities and insights spanning bioanalytical and biophysical chemistry, materials science, and fundamental molecular-level research. We discuss approaches where thin films have been vital, enabling experimental studies using a variety of optical spectroscopies across the visible and infrared spectral range, electron microscopies, and related techniques such as electron energy loss spectroscopy, X-ray photoelectron spectroscopy, and single molecule sensing. We anchor this broad discussion by highlighting two particularly exciting exemplars: a thin-walled nanofluidic sample cell concept that has advanced the discovery horizons of ultrafast spectroscopy and of electron microscopy investigations of in-liquid samples; and a unique class of thin-film-based nanofluidic devices, designed around a nanopore, with expansive prospects for single molecule sensing. Free-standing, low-stress silicon nitride membranes are a canonical structural element for these applications, and we elucidate the fabrication and resulting features-including mechanical stability, optical properties, X-ray and electron scattering properties, and chemical natureof this material in this format. We also outline design and performance principles and include a discussion of underlying material preparations and properties suitable for understanding the use of alternative thin-film materials such as graphene.

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Section: Nanofluidic Sample Cellsmentioning

confidence: 99%

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Dwyer

Harb

2017

Appl Spectrosc

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“…An alternative patterning approach, one that circumvents challenges seen in traditional lithography, has emerged that employs Focused Ion Beam (FIB) milling [21] of free-standing graphene. This approach has been used to pattern graphene into diffraction gratings [22], nanopores [23], and nanowires [24]. The FIB technique has seen little use as a method to pattern single-layer graphene nanomechanical systems and has presently only been used to fabricate low-aspect ratio cantilevers [25] with no associated improvements to the Q.…”

Section: Introductionmentioning

confidence: 99%

Shape tailoring to enhance and tune the properties of graphene nanomechanical resonators

Miller

Alemán

2017

2D Mater.

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The shape of a nanomechanical resonator profoundly affects its mechanical properties and determines its suitability for various applications, such as ultra-sensitive mass and force detection. Despite the promise of two-dimensional nanomechanical systems in such applications, full control over the shape of suspended two-dimensional materials, such as graphene, has not been achieved. We present an effective, single-step method to shape presuspended graphene into nanomechanical resonators with arbitrary geometries leading to enhanced properties in comparison to conventional drumheads. Our technique employs focused ion beam milling and achieves feature sizes ranging from a few tens of nanometers to several microns, while obtaining near perfect yield. We compare the mechanical properties of the shaped devices to unmodified drumheads, and find that low-tension, singlyclamped graphene cantilevers display a 20-fold increase in the mechanical quality factor (Q) with a factor 100 reduction in the mechanical damping. Importantly, we achieve these results while simultaneously removing mass, which enables state-of-the-art force sensitivity for a graphene mechanical resonator at room temperature. Our approach opens up a unique, currently inaccessible regime in graphene nanomechanics, one characterized by low strain, low frequency, small mass, and high Q, and facilitates tailoring of non-linearity and damping in mechanical structures composed of graphene and other 2D crystals.

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“…Graphene should then be impermeable to atoms, molecules and ions [2] when they do not have enough energy to go through the electron cloud. Experimentally, suspended graphene has been measured to withstand an irradiation dose up to approximately 10 16 ions/cm 2 at tens of keV energies [3]. Other experiments have shown that graphene is completely impermeable to helium atoms up to 6 atm [4].…”

Section: Introductionmentioning

confidence: 99%

Charge transfer properties through graphene for applications in gaseous detectors

Franchino

González-Díaz

Hall-Wilton

et al. 2016

Nuclear Instruments and Methods in Physics Research Section A:

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Graphene is a single layer of carbon atoms arranged in a honeycomb lattice with remarkable mechanical and electrical properties. Regarded as the thinnest and narrowest conductive mesh, it has drastically different transmission behaviours when bombarded with electrons and ions in vacuum. This property, if confirmed in gas, may be a definitive solution for the ion back-flow problem in gaseous detectors. In order to ascertain this aspect, graphene layers of dimensions of about 2 × 2 cm 2 , grown on a copper substrate, are transferred onto a flat metal surface with holes, so that the graphene layer is freely suspended. The graphene and the support are installed into a gaseous detector equipped with a triple Gaseous Electron Multiplier (GEM), and the transparency properties to electrons and ions are studied in gas as a function of the electric fields. The techniques to produce the graphene samples are described, and we report on preliminary tests of graphene-coated GEMs.

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FIB carving of nanopores into suspended graphene films

Cited by 38 publications

References 14 publications

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection

Shape tailoring to enhance and tune the properties of graphene nanomechanical resonators

Charge transfer properties through graphene for applications in gaseous detectors

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