An ilmenite-hematite solid solution ͑Fe 2-x Ti x O 3 ͒ is one of the candidates for practical magnetic semiconductors with a high Curie temperature. We have prepared well-crystallized epitaxial Fe 2-x Ti x O 3 films with a wide range of Ti concentrations-x = 0.50, 0.60, 0.65, 0.76, 0.87, and 0.94-on ␣-Al 2 O 3 ͑001͒ substrates. The films are prepared by a reactive helicon plasma sputtering technique to evaporate Fe and TiO targets simultaneously under optimized oxygen pressure conditions. The structural characterizations of the films reveal that all films have a single phase of the ordered structure with R3 symmetry, where Ti-rich and Fe-rich layers are stacked alternately along the c axis. All films have large ferrimagnetic moments at low temperature, and room temperature magnetization is clearly observed at x Ͻ 0.7. The inverse temperature dependence of the resistivities of the films indicates their semiconducting behavior. The film resistivities decrease with decreasing Ti concentration.