2021
DOI: 10.1002/aelm.202100306
|View full text |Cite
|
Sign up to set email alerts
|

Ferroelectric α‐In2Se3 Wrapped‐Gate β‐Ga2O3 Field‐Effect Transistors for Dynamic Threshold Voltage Control

Abstract: Indium selenide (α‐In2Se3), which is a recently emerging ferroelectric semiconductor, can solve a major hindrance to applications of an ultra‐wide bandgap beta‐gallium oxide (β‐Ga2O3) semiconductor. Here, ferroelectric α‐In2Se3 wrapped‐gate β‐Ga2O3 field‐effect transistors (FETs) for dynamic threshold voltage (VTH) control is demonstrated. The dry‐transferred α‐In2Se3 layer is wrapped around β‐Ga2O3 channel, which allows efficient electrostatic gate modulation. Thus, the ferroelectricity of α‐In2Se3 and a thin… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
5
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
8

Relationship

3
5

Authors

Journals

citations
Cited by 12 publications
(5 citation statements)
references
References 37 publications
(45 reference statements)
0
5
0
Order By: Relevance
“…The direct actuation of the mechanical platform using the artificial NMJ provides a wide range of neuromorphic sensing-to-action applications, including time-offlight ranging (38)(39)(40)(41)(42)(43), in-sensor/near-sensor computing (44)(45)(46)(47)(48), and human-computer interaction (49). In this study, we achieved a normalized output current of 200 mA/mm with the CIPS/GaN FeHEMT, which is notably greater than that of recently reported synaptic transistors (for more details, see table S1) (50)(51)(52)(53)(54)(55)(56)(57)(58)(59). Therethe CIPS/GaN FeHEMT is potentially deployable as an artificial NMJ in robotic systems to operate mechanical actuators that require a milliampere-scale driving current for macro-motion.…”
Section: Discussionmentioning
confidence: 76%
“…The direct actuation of the mechanical platform using the artificial NMJ provides a wide range of neuromorphic sensing-to-action applications, including time-offlight ranging (38)(39)(40)(41)(42)(43), in-sensor/near-sensor computing (44)(45)(46)(47)(48), and human-computer interaction (49). In this study, we achieved a normalized output current of 200 mA/mm with the CIPS/GaN FeHEMT, which is notably greater than that of recently reported synaptic transistors (for more details, see table S1) (50)(51)(52)(53)(54)(55)(56)(57)(58)(59). Therethe CIPS/GaN FeHEMT is potentially deployable as an artificial NMJ in robotic systems to operate mechanical actuators that require a milliampere-scale driving current for macro-motion.…”
Section: Discussionmentioning
confidence: 76%
“…The 2DEG was depleted when the ferroelectric polarization was contrary to the polarization of the AlGaN barrier layer (yellow arrows in Figure a). We performed TCAD (Synopsys Corp.) simulation using an experimentally calibrated model before and after the etching process to verify the effect of polarization concentration, as shown in Figure f and g. The bandgap energies of GaN, AlGaN, Al 2 O 3 , and α-In 2 Se 3 utilized for TCAD simulation are 3.4, 4.0, 6.4, and 1.39 eV, respectively; furthermore, corresponding electron affinities are 4.1, 4.6, 1.35, and 3.6 eV. The arrows in Figure f and g indicate the vectors of the total polarization in α-In 2 Se 3 , whereas the color chart shows the magnitude of the lateral polarization. The simulation confirmed that lateral polarization was suppressed when the α-In 2 Se 3 layer was self-aligned with the gate metal, while the total polarization was preserved.…”
Section: Resultsmentioning
confidence: 99%
“…where W tip is the work function of the tip and P KPFM is the measured potential, [30] Figure S3, Supporting Information. The work functions of WSe 2 and Ga 2 O 3 were measured to be 4.85 and 4.06 eV, respectively.…”
Section: Electrical and Photoresponse Characteristicsmentioning
confidence: 99%