Ferroelectric Thin-Film Capacitors and Piezoelectric Switches for Mobile Communication Applications

Constitutive Equations of Piezoelectric Layered Beams With Interdigitated Electrodes

“…The effective Young's modulus Y , the piezoelectric coupling constants d, and the dielectric constant ε for d 31 (3,4) [27] and d 33 (5,6) coupling are defined as…”

“…M ANY solid state devices ultilize piezoelectric sensors, actuators, and transducers in their designs, e.g. energy scavengers [1], accelerometers [2], switches [3], micromirrors [4] and ultrasonic biomedical probes [5]. For some of these applications, a layered beam which consists of many layers of piezoelectric, elastic, insulating or conducting materials is often exploited.…”

Thin fim barium strontium titanate capacitors for tunable RF frond-end applications

“…Since the 1940's numerous research groups worldwide have devoted research to Ba x Sr 1−x Ti 1+y O 3+z [24,32,38,40,41,48,83,[99][100][101][102][103][104][105][106]. The understanding of the physical behavior of barium titanate ceramics started to evolve between 1940-1950 [24,99].…”

“…Note that 3 V dc is much lower than the maximum electrical field strength. The work on the improved performance of the TiO 2 /Pt bottom electrode in relation to the tuning ratio at low operating voltages has been published in the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control journal [101].…”

“…Before the start of the research in this work, ferroelectric capacitors already have been optimized for low-frequency applications, using wetchemical processing of lead zirconate titanate ceramics [101], and are currently being mass-produced, yielding a high throughput, in combination with semiconductor factory-compatible materials.…”