AbstractÀThis paper describes the design and processing of ferroelectric parallel plate capacitors embedded within a low temperature cofired ceramics (LTCC) structure. A capacitor is fabricated by filling a via hole with ferroelectric paste. Using ferroelectric materials, low-loss barium strontium titanate (BST) and barium zirconate titanate (BZT), as dielectric materials provide a wide range of tunability, in addition to low loss and low production cost. In addition, embedding tunable capacitors (varactors) inside LTCC reduces loss, size, weight, and cost. The paper also gives a comparison between the use of BST and BZT as tunable dielectric materials embedded inside an LTCC with respect to preparation process, applied voltage, shrinking factors, and quality factors.