Ferroelectric Enhancement in a TiN/Hf1–xZrxO2/W Device with Controlled Oxidation of the Bottom Electrode
Santosh P. Chiniwar,
Ya-Chen Hsieh,
Ching-Hsiang Shih
et al.
Abstract:Hf 1−x Z x O 2 (HZO) is a promising ferroelectric (FE) material with CMOS compatibility, while the TiN/HZO/W metal-ferroelectric-metal structure provides balanced thermal expansion for stacking. In this study, we developed a 7 nm film of HZO with a FE polarization (2P r ) value of ∼43 μC/cm 2 and cycling endurance of 10 8 by determining the appropriate oxidation state for a W bottom electrode deposited via atomic layer deposition with a relatively low annealing temperature of 400 °C. To visualize FE uniformity… Show more
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