2008
DOI: 10.1088/0960-1317/18/3/035020
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Femtosecond laser micromachining of dielectric materials for biomedical applications

Abstract: Techniques for microfluidic channel fabrication in soda-lime glass and fused quartz using femtosecond laser ablation and ablation in conjunction with polymer coating for surface roughness improvement were tested. Systematic experiments were done to characterize how process variables (laser fluence, scanning speed and focus spot overlap, and material properties) affect the machining feature size and quality. Laser fluence and focus spot overlap showed the strongest influence on channel depth and roughness. At h… Show more

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Cited by 71 publications
(43 citation statements)
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References 34 publications
(47 reference statements)
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“…The variance in the response of different target materials to irradiation with ultrashort pulses was examined as well [16,[36][37][38]. Single pulse ablation characteristics of silica have been reported [16,30,[33][34][35]37,[39][40][41][42][43][44][45]. CaF 2 [46], sapphire [16,40,47], various types of glasses [38,41,42,[48][49][50][51] and even polymers, e.g.…”
Section: Introductionmentioning
confidence: 99%
“…The variance in the response of different target materials to irradiation with ultrashort pulses was examined as well [16,[36][37][38]. Single pulse ablation characteristics of silica have been reported [16,30,[33][34][35]37,[39][40][41][42][43][44][45]. CaF 2 [46], sapphire [16,40,47], various types of glasses [38,41,42,[48][49][50][51] and even polymers, e.g.…”
Section: Introductionmentioning
confidence: 99%
“…26 Recent application of femtolaser is in microfabrication of micro-electro-mechanical systems (MEMS) devices based on polymer, glass, 27 silicon wafer, 28 and dielectric materials such as soda-lime glass and fused quartz. 29 In tissue engineering application, femtosecond laser was reported in generating surface modification on polymer thin films such as poly(glycolic acid), 30 polypropylene, 31 and poly(ecaprolactone). 30,32 Creating microchannels directly on a biodegradable polymer scaffold using femtosecond laser has not been reported till date.…”
Section: Introductionmentioning
confidence: 99%
“…The inscription procedure can therefore lead to markedly different results, and methods can be employed to improve or control roughness, such as overwriting existing channels, optimise the laser inscription energy and write velocity, in addition to control of the height of the laser focus point relative to the sample surface. Furthermore, these levels of average roughness can be significantly improved by post processing the samples, for example, coating the channels with hydroxyethyl methacrylate (HEMA) polymer coating that can lead to coated channels with an rms roughness of 10-50 nm [13]. Methods that introduce glass reflow in the femtosecond laser processed areas of the samples can also be used to improve levels of roughness, such as the use of optical polishing with CO 2 lasers or processing in a high temperature oven [14,15].…”
Section: Fabrication Of Microfluidic Structuresmentioning
confidence: 99%