Femtosecond laser induced tunable surface transformations on (111) Si aided by square grids diffraction

Han, Weina; Jiang, Lan; Li, Xiaowei; Liu, Yang; Lu, Yongfeng

doi:10.1063/1.4938244

Cited by 8 publications

(4 citation statements)

References 27 publications

(35 reference statements)

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“…Up to now, these two types of surface structures have become a universally observed feature in the fs laser multipulse ablation [3][4][5]. For example, in the case of silicon, SWS with period Λ ranging from 500 to 800 nm (0.6λ < Λ ≈ λ, λ 800 nm) were observed under the amplified fs-laser pulsed exposure [12][13][14][15][16][17][18][19][20]. DSWS with a period of 70-130 nm (Λ < λ∕6, λ 800 nm) were realized by a fs-laser oscillator at a several tens of megahertz (MHz) repetition rate [21,22] or by a fs-laser amplifier in solution [17,23,24].…”

Section: Introductionmentioning

confidence: 99%

Competition between subwavelength and deep-subwavelength structures ablated by ultrashort laser pulses

Wang

Cao

et al. 2017

Optica

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Femtosecond laser-induced periodic subwavelength and deep-subwavelength structures (SWS; DSWS) have attracted attention due to their subdiffraction resolution of surface and inner volume patterning. Understanding of the richness of laser-matter interaction during formation of SWS and DSWS is another quest which can help to find control for nanoscale fabrication. Lack of control over SWS and DSWS formation has impacted their wider use and calls for a deeper insight into the relationship between them. Herein we present a systematic study defining a criterion for imprinting either SWS or DSWS, which is based on a competition and their mutual incompatibility discriminated by the laser fluence and pulse accumulation. Structure evolution of SWS and DSWS is highly dependent on the localized effective laser fluence, which determines the instantaneous optical permittivity by the laser-excited electrons creating an active plasma layer. The proposed universal SWS and DSWS competition mechanism involving the laser-induced plasma wave at the plasma-substrate interface ties together many previous observations and unifies the discussed mechanisms of surface nanoripple formation.

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Section: Introductionmentioning

confidence: 99%

Competition between subwavelength and deep-subwavelength structures ablated by ultrashort laser pulses

Wang

Cao

et al. 2017

Optica

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“…The Sipe–Drude model expresses this process; the interference of the electric field of the SPPs with the incident laser leads to a spatially modulated energy deposition into the material and finally generates the LSFL via inhomogeneous ablation [ 39 , 40 , 41 ]. In addition, the initial surface ripple formed by the previous pulse causes the SPP to scatter vertically along the direction of the nanoripple, which enhances the surface plasma wave conversion and further deepens the nanoripples [ 42 , 43 , 44 ].…”

Section: Resultsmentioning

confidence: 99%

Broadband Antireflective Hybrid Micro/Nanostructure on Zinc Sulfide Fabricated by Optimal Bessel Femtosecond Laser

2023

Nanomaterials

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Enhancing the infrared window transmittance of zinc sulfide (ZnS) is important to improve the performance of infrared detector systems. In this work, a new hybrid micro/nanostructure was fabricated by an optimal Bessel femtosecond laser on ZnS substrate. The surface morphologies and profiles of ASS ablated by a 20× microscope objective Bessel beam are described, indicating that the nanoripples on the micropore were formed by the SPP interference and the SPP scattering in a particular direction. Further, the maximum average transmittance of ASS increased by 9.7% and 12.3% in the wavelength ranges of 5~12 μm and 8~12 μm, respectively. Finally, the antireflective mechanism of the hybrid micro/nanostructure is explored using the novel electromagnetic field model based on the FDTD method, and we attribute the stable antireflective performance of ASS in broadband to the interface effective dielectric effect and LLFE.

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“…However, there is limited research on the effects of different relative angles among the scanning direction, crystal orientation, and laser polarization direction on the generation of LIPSSs in crystal materials. Han et al [30] conducted related research on the surface of Si (111), analyzing the anisotropy of elliptically modified morphologies caused by enhanced energy absorption along the laser polarization direction and scattering of surface plasmon polaritons (referred to as the laser polarization scanning direction anisotropy effect). They also examined its impact on the line width and continuity of low spatial frequency laserinduced periodic surface structures (LSFLs), as reported in their study.…”

Section: Introductionmentioning

confidence: 99%

Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface

Liu,

Lu,

et al. 2024

Micromachines

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Utilizing the principle of laser-induced periodic surface structures (LIPSSs), this research delves into the morphological evolution of single-crystal silicon surfaces irradiated by a near-infrared picosecond laser through a scanning mode. With the increase in laser energy density, the nanostructure morphology on single-crystal silicon surfaces induced by incident lasers with different polarization directions sequentially produces high spatial-frequency LIPSSs (HSFLs) with a period of 220 nm ± 10 nm parallel to the laser polarization, low spatial-frequency LIPSSs (LSFLs) with a period of 770 nm ± 85 nm perpendicular to the direction of the polarization, and groove structures. Furthermore, by varying the angle between the laser polarization and the scanning direction, the study examined the combined anisotropic effects of the laser polarization scanning direction angle and the laser polarization crystal orientation angle on the genesis of LIPSSs on single-crystal silicon (100) surfaces. The experiments revealed polarization-related anisotropic characteristics in the morphology of HSFLs. It was found that when the polarization angle approached 45°, the regularity of the LSFLs deteriorated, the modification width decreased, and the periodicity increased. This is critical for the precise control of the LSFLs’ morphology.

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Femtosecond laser induced tunable surface transformations on (111) Si aided by square grids diffraction

Cited by 8 publications

References 27 publications

Competition between subwavelength and deep-subwavelength structures ablated by ultrashort laser pulses

Competition between subwavelength and deep-subwavelength structures ablated by ultrashort laser pulses

Broadband Antireflective Hybrid Micro/Nanostructure on Zinc Sulfide Fabricated by Optimal Bessel Femtosecond Laser

Polarization-Dependent Anisotropy of LIPSSs’ Morphology Evolution on a Single-Crystal Silicon Surface

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