2010
DOI: 10.1364/ol.35.003556
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Femtoliter tunable optical cavity arrays

Abstract: Large arrays of uniform, precisely tunable, open-access optical microcavities with mode volumes as small as 2.2 μm(3) are reported. The cavities show clear Hermite-Gauss mode structure and display finesses up to 460, in addition to quality (Q) factors in excess of 10,000. The cavities are attractive for use in quantum optics applications, such as single atom detection and efficient single photon sources, and have potential to be extended for experiments in the strong coupling regime.

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Cited by 96 publications
(107 citation statements)
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“…Microcavities suitable for photon BEC can be constructed using focussed ion beam milling to pattern the confining potential through the surface shape [86]. Notably, Ref.…”
Section: Which System Is Smaller?mentioning
confidence: 99%
“…Microcavities suitable for photon BEC can be constructed using focussed ion beam milling to pattern the confining potential through the surface shape [86]. Notably, Ref.…”
Section: Which System Is Smaller?mentioning
confidence: 99%
“…In the following, we briefly summarize micro-machining approaches that have been used to fabricate hybrid-integrated cavities, with some emphasis on recent efforts aimed at the eventual monolithic integration of mirrors and cavities with other functional devices. [73], (b) a laser machined fiber end [12], (c) array of concave features made by FIB milling [11], (d) two silicon micro-mirrors fabricated by dry etching [74], (e) array of cantilever based micro-mirrors [75], (f) and a waveguide connected buckled-dome microcavity [16].…”
Section: Chip-based Fpcs For Cqedmentioning
confidence: 99%
“…to the high-field regions of the cavity mode, which resides primarily in the space between the mirrors. These factors have driven a significant effort towards the realization of microscale, curved-mirror FPCs, using techniques such as focused-ion-beam (FIB) milling [11] or laser ablation [12] to form the curved surfaces. A popular approach, which has the significant advantage of providing a built-in means for light-coupling, is to fabricate one or both mirrors on the end-face of a single-mode optical fiber [12,13].…”
Section: Introductionmentioning
confidence: 99%
“…Starting from flat Silica substrates from UQG Optics, we pattern one of them with a Focused Ion Beam (FIB) [30] in order to produce concave templates. Our fabrication method produces the desired shape with nanometric accuracy [28].…”
Section: Chip Design and Experimental Setupmentioning
confidence: 99%