Feedback Control in Station Dispatching to Improve Constraint Tool Output in 300mm Fabs

Krishna, Murali; Kalmus, Michael; Madson, Robert A; Mert, Arca; Mosgrove, David J; Trimeloni, Akanksha T; Merrill, Christopher J; Zhao, Zhili L

doi:10.1109/asmc61125.2024.10545440

2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2024

DOI: 10.1109/asmc61125.2024.10545440

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Feedback Control in Station Dispatching to Improve Constraint Tool Output in 300mm Fabs

Murali Krishna,

Michael Kalmus,

Robert A Madson

et al.

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Feedback Control in Station Dispatching to Improve Constraint Tool Output in 300mm Fabs

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References 8 publications

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