2021
DOI: 10.21272/jnep.13(5).05017
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Features OfInelastic and Elastic Characteristics of Si and SiO2/Si Structures

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Cited by 3 publications
(2 citation statements)
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“…To measure the temperature dependences of IF Q −1 (Т) and elastic modulus E(T), resonance vibrations at frequency f ≈ 2 kHz and the methods of a complete piezoelectric oscillator at frequency f ≈ 117 kHz and during alternative deformation ε ≈ 10 −6 in vacuum P ≈ 10 −3 Pa were used. The measurement error of IF determination was ΔQ −1 /Q −1 ≈ 10%, and the relative change in the elastic modulus was ΔE/E ≈ 0.1% [17][18][19][20][21].…”
Section: Methodsmentioning
confidence: 98%
“…To measure the temperature dependences of IF Q −1 (Т) and elastic modulus E(T), resonance vibrations at frequency f ≈ 2 kHz and the methods of a complete piezoelectric oscillator at frequency f ≈ 117 kHz and during alternative deformation ε ≈ 10 −6 in vacuum P ≈ 10 −3 Pa were used. The measurement error of IF determination was ΔQ −1 /Q −1 ≈ 10%, and the relative change in the elastic modulus was ΔE/E ≈ 0.1% [17][18][19][20][21].…”
Section: Methodsmentioning
confidence: 98%
“…Methods.-Ultrasonic pulse-phase method using "USMV-LETI" (Ultrasonic Measurement Velocity-Leningrad Electrotechnical Institute), modernized "USMV-KNU" (Ultrasonic Measurement Velocity-Kyiv National University) and computerized ultrasound velocity measurement device "KERN-4" with frequencies f ║ ≈ 1 MHz and f ┴ ≈ 0.7 MHz. 18,19 The measurement error of the ultrasound velocity was…”
Section: Methodsmentioning
confidence: 99%