Features of the two-stage formation of macroporous and mesoporous silicon structuresя

Abstract

The aim of this work was the formation of multilayer structures of macroporous silicon and the study of their structural, morphological, and optical properties in comparison with the properties of multilayer structures of mesoporous silicon. The paper presents the results of the development of techniques for the formation of multilayer structures of porous silicon por-Si by stepwise change in the current with two-stage modes of electrochemical etching.The data on the morphology, composition, and porosity of macroporous and mesoporous silicon samples were obtained using scanning electron microscopy, IR spectroscopy, and X-ray reflectivity. It was shown that with the two-stage growth of porous silicon layers, the depth of the boundary between the layers of the structure was determined by the primary mode of electrochemical etching, while the total layer thickness increased with an increase in the current density of electrochemical etching.A comparative analysis of the relative intensity and fine structure of vibrational modes of IR spectra indicated a significantly more developed specific pore surface and greater sorption capacity of mesoporous silicon as compared to macroporous silicon.
 
 
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Features of the Composition and Photoluminescent Properties of Porous Silicon Depending on Its Porosity Index

“…Porous silicon samples were obtained by electrochemical etching (ECE) of singlecrystalline silicon plates of n-(KEF) and p-type (KDB) in a solution of hydrofluoric acid, isopropyl alcohol and hydrogen peroxide according to the methods described in [9]. The parameters of the etching procedures are presented in Table 1.…”