Features of sputtering of nitrides and their components

Abstract

The sputtering behaviour of hexagonal or wurtzite polycrystal nitrides of boron, aluminium, and gallium was explored employing methods of molecular dynamics. The sputtering yield Y of nitrides and the average energyĒ 1 of emitted particles were studied as dependent on the mass m 1 of bombarding He, Li, B, N, Ne, Al, Ar, Ni, Ga, Kr, and Xe ions with the initial energy E 0 between 200 and 10,000 eV. Y (m 1 ) andĒ 1 (m 1 ) were researched upon for preferential sputtering of nitride components at low E 0 . It was revealed that the ratio between the sputtering yield of the light component and that of the heavy one depends on ion energy and mass. At E 0 = 200 eV and m 1 = 40, the ratio for BN, AlN, and GaN amounts to 1.2, 2.2, and 2.4, respectively. For nitride components, an anomalous dependence of sputtering on ion mass was found, its maximum occurring at a certain ratio m 2 /m 1 , where m 2 is the averagè mass of two nitride components.